Skip to main content Accessibility help
×
Home

High-Quality Polycrystalline Silicon thin Films Prepared by Solid Phase Crystallization (Spc) Method

  • T. Matsuyama (a1), T. Baba (a1), M. Tanaka (a1), S. Tsuda (a1), H. Nishiwaki (a1), S. Nakano (a1), H. Hanafusa (a1) and Y. Kuwano (a1)...

Abstract

The relationship between the grain size of poly-Si after SPC and the structure of a-Si before SPC was studied. The structure of a-Si was characterized by TA/TO: the Raman intensity ratio of the Transverse Acoustic (TA) like band and the Transverse Optical (TO) like band. A good positive correlation between the grain size and TS/TO was revealed for the first time. The nucleation and growth kinetics were speculated by using a thermodynamic model. The grain size could be enlarged up to 6 μ m by applying textured substrates to a-Si with a large structural disorder. This film was applied to the active layer of solar cells, and a collection efficiency of 51% at 900 nm was obtained.

Copyright

References

Hide All
1) Takakura, H., Miyagi, K., Kanata, T., Okamoto, H., and Hamakawa, Y., Proc 4th Int'l PVSEC. 403 (1989).
2) Baliga, B.J., J. Cryst. Growth. 41, 199 (1977).
3) Haberecht, R.R. and Kern, E.L., in Semiconductor Silicon (Electrochemical Society, 1969).
4) Matsuyama, T., Taguchi, M., Tanaka, M., Matsuoka, T., Tsuda, S., Nakano, S. and Kuwano, Y., Jpn. J. Appl. Phys. 29, 2327 (1990).
5) Gat, A., Gerzlieyg, L., Gibbons, J.F., Magee, T.J., Peng, J., and Hong, J.D., Appl. Phys. Lett. 33, 775 (1978).
6) Matsuyama, T., Sasaki, M., Tanaka, M., Wakisaka, K., Nakano, S., Kishi, Y., and Kuwano, Y., Proc 6th Int'l PVSEC. 753 (1992).
7) Shimada, T., Katayama, Y., Nakagawa, K., Matsubara, H., Migitaka, M. and Maruyama, E., J.Non-Cryst. Solids. 59 & 60, 783 (1983).
8) Taguchi, M., Tanaka, M., Matsuyama, T., Matsuoka, T., Tsuda, S., Nakano, S., Kishi, Y. and Kuwano, Y., Proc 5th Int'l PVSEC. 26 (1990).
9) Kelton, K.F., Greer, A.L. and Thompson, C.V., J. Chem. Phys. 79, 6261 (1983).
10) Iverson, R.B. and Reif, R., J. Appl. Phys. 62, 1675 (1987).
11) Saito, T., Karasawa, T. and Ohdomari, I., J. Non-Cryst Solids. 50, 271 (1982)
12) Yehoda, J.E. and Lannin, J.S., J. Vac. Sci. Technol. Al, 392 (1983).

High-Quality Polycrystalline Silicon thin Films Prepared by Solid Phase Crystallization (Spc) Method

  • T. Matsuyama (a1), T. Baba (a1), M. Tanaka (a1), S. Tsuda (a1), H. Nishiwaki (a1), S. Nakano (a1), H. Hanafusa (a1) and Y. Kuwano (a1)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed