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Highly Supersaturated, Highly Strained Sputtered Ag-Co and Ag-Ni Layers

  • L. Velterop (a1), A. Buis (a1), R. Delhez (a1), Th.H. de Keijser (a1), E.J. Mittemeijer (a1) and D. Reefman (a2)...

Abstract

Thin Ag-Ni and Ag-Co layers with compositions of 0, 15, 22 to 28 at% Ni or Co were made by magnetron sputtering. TEM experiments revealed that the layers exhibited a {111} fiber texture with a high density of twins, always with the twinning plane parallel to the layer surface. X-ray diffraction and TEM results indicate that all Ni or Co is dissolved in the Ag, although some compositional inhomogeneity occurs: the layers are highly supersaturated with Ni or Co. Unlike the pure Ag layer, the Ag-Ni and Ag-Co layers exhibited high strains in the as prepared state.

Upon annealing Ni or Co precipitated. The Ni precipitates were small, spherical particles oriented parallel to the surrounding Ag. The strains in the Ag-Ni and Ag-Co layers after annealing were less than the calculated thermal strains, but they were larger than the strain in the pure Ag layer after an equal annealing treatment.

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1. Parker, M.A., Coffey, K.R., Hylton, T.L. & Howard, J.K. in Magnetic Utrathin Films. Multilayers and Surface/Magnetic interfaces - Physics and Characterization, edited by Chappert, C. et al. (Mat. Res. Soc. Proc. 313, Pittsburgh, PA, 1993), p. 8590
2. Jiang, J.S., Xiao, J.Q. & Chien, C.L., Appl. Phys. Lett. 61 (19), (1992), p. 23622364
3. Bain, X., Zaluska, A., Altounian, Z., Stròm-Olsen, J.O., Huai, Y. & Cochrane, R.W. in Magnetic Utrathin Films. Multilayers and Surface/Magnetic interfaces - Physics and Characterization. edited by Chappert, C. et al. (Mat. Res. Soc. Proc. 313, Pittsburgh, PA, 1993), p. 405410
4. Li, D.Y. & Chen, L.Q., Acta Mater. 45 No 2, (1997), p. 471479
5. Karakaya, I. & Thompson (Ag-Co), W.T. and Singleton, M. & Nash, P. (Ag-Ni) in Binary Alloy Phase Diagrams. 2nd edition by Massalski, T.B., Okamoto, H., Subramanian, P.R. & Kacprzak, L., ASM International, (1990), p. 25, 26, 64–66
6. Hauk, V.M. & Macherauch, E., Adv. X-ray Anal. 27, (1983), p. 8199
7. Segmüller, A. & Murakami, M. in Analytical Techniques for Thin Films, edited by Tu, K.N. & Rosenberg, R. (Treatise on Mat. Sci. and Techn. 27, Academic Press, Boston, 1988), p. 143200
8. Warren, , X-ray diffraction. Eddison-Weshley Publishing Company, Massachusetts, (1969), p. 275298
9. Hendriks, M., X-ray Diffraction Study of Polycrystalline Silicon Layers. Ph.D. thesis, Delft University of Technology, (1985), p. 4956
10. Velterop, L., Buis, A., Delhez, R., de Keijser, Th.H., Mittemeijer, E.J. & Reefman, D. to be published
11. Machlin, E.S., Materials Science in Microelectronics. The relationship between thin film processing and structure. Giro Press, Croton-on-Hudson, N.Y., (1995), p. 7381, 98
12. Lide, D.R., Handbook of Chemistry and Physics. 73rd edition, CRC Press, Boca Raton, (1992), tables 1278/130/131
13. Lodder, J.C., de Haan, P. & van Kranenburg, H., J. Magn. Magn. Mater. 128, (1993), p. 219

Highly Supersaturated, Highly Strained Sputtered Ag-Co and Ag-Ni Layers

  • L. Velterop (a1), A. Buis (a1), R. Delhez (a1), Th.H. de Keijser (a1), E.J. Mittemeijer (a1) and D. Reefman (a2)...

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