Skip to main content Accessibility help

High Resolution X-Ray Scattering Studies of Strain in Epitaxial Thin Films of Yttrium Silicide Grown on Silicon(111)

  • L. J. Martinez-Miranda (a1), M. P. Siegal (a2), P. A. Heiney (a3), J. J. Santiago-Aviles (a1) and W. R. Graham (a2)...


We have used high resolution grazing incidence x-ray scattering (GIXS) to study the in-plane and out-of-plane structure of epitaxial YSi2-x films grown on Si (111), with thicknesses ranging from 85Å to 510Å. Our results indicate that the films are strained, and that film strain increases as a function of thickness, with lattice parameters varying from a = 3.846Å/c = 4.142Å for the 85Å film to a = 3.877Å/c = 4.121Å for the 510Å film. We correlate these results with an increase in pinhole areal coverage as a function of thickness. In addition, our measurements show no evidence for the existence of ordered silicon vacancies in the films.



Hide All
1 Segmüller, A., Thin Solid Films, 154, 33 (1987).
2 Siegal, M.P., Kaatz, F.H., Graham, W.R., Santiago-Avilés, J.J. and Van der Spiegel, J., J. Appl. Phys. 66, 2999 (1989) .
3 Knapp, J.A. and Pieraux, S.T., Appl. Phys., 48, 466 (1987).
4 Baglin, J.E.E., d’Heurle, F.M. and Petersson, C.S., J. Appl. Phys., 52, 2841 (1981).
5 Gurvitch, M., Levi, A.F.J., Tung, R.T. and Nakahara, S., Appl. Phys. Lett., 51, 311 (1987).
6 Prutton, M., Surface Physics, Clarendon Press, Oxford, (1984) .
7 Siegal, M.P., Graham, W.R. and Santiago-Avilés, J.J., submitted to J. Appl. Phys.
8 Marra, W.C., Eisenberger, P. and Cho, A.Y., J. Appl. Phys., 50, 6927 (1979).
9 Ishizaki, A. and Shiraki, Y., J. Electrochem. Soc, 133, 666 (1986) .
10 Baglin, J.E., d’Heurle, F.M. and Petersson, C.S., Appl. Phys. Lett., 36, 594 (1980).
11 Hamann, D.R., Phys. Rev. Lett., 60, 313 (1988).
12 Tung, R.T. and Batstone, J.L., Appl. Phys. Lett, 52, 1611 (1988).


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed