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High Resolution X-Ray Diffraction Analysis of Piezoelectric LiNbO3 Films.

  • Yoshihiko Shibata (a1), Naohiro Kuze (a1), Masahiro Matsui (a1), Masaki Kanal (a2) and Tomoji Kawai (a2)...

Abstract

Thin LINbO3 films are deposited on (001) sapphire and (001) LiTaO3 substrates by using pulsed excimer-laser ablation. These films are evaluated by high-resolution X-ray diffraction (HRXRD) analysis. Strained LiNbO3 films in which the a-axis is longer and the c-axis is shorter than those of LiNbO3 single crystals are deposited on the sapphire substrates. On the other hand, extremely high-quality LiNbO3 films in which the a-axis of the films is the same as that of substrates are grown on the LiTaO substrates. X-ray rocking curves for the (006) reflection showed very narrow full width at half maximum (FWHM) of 208 arcsec for the films on the sapphire substrates, and 9 arcsec for the films on LiTaO3 substrates.

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