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High Resolution Electron Microscopy of Sputter-Deposited Zirconia-Alumina Nanolaminates

Published online by Cambridge University Press:  15 February 2011

M. A. Schofield ,
R. Whig ,
C. R. Aita  and
M. Gajdardziska-Josifovska
M. A. Schofield
Affiliation:
Department of Physics and the Laboratory for Surface Studies, University of Wisconsin-Milwaukee, P.O. Box 413, Milwaukee, WI 53201
R. Whig
Affiliation:
Materials Department and the Laboratory for Surface Studies, University of Wisconsin-Milwaukee, P.O. Box 784, Milwaukee, WI 53201
C. R. Aita
Affiliation:
Materials Department and the Laboratory for Surface Studies, University of Wisconsin-Milwaukee, P.O. Box 784, Milwaukee, WI 53201
M. Gajdardziska-Josifovska
Affiliation:
Department of Physics and the Laboratory for Surface Studies, University of Wisconsin-Milwaukee, P.O. Box 413, Milwaukee, WI 53201
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Abstract

High resolution electron microscopy is employed to study the crystallography and morphology of zirconia nanocrystallites in zirconia-alumina nanolaminates and zirconia films. Unity volume fraction of tetragonal zirconia formed when the zirconia layer thickness was less than 6.2 nm, a theoretically predicted critical size for tetragonal-to-monoclinic zirconia (t -> m-ZrO2) transformation. In thicker layers, monoclinic zirconia formed, accompanied by renucleation and void formation which caused roughness to the zirconia nanolayers. The average position of the voids in the layers was 6.3 nm from the growth interface, coinciding with the critical dimension for t -> m-ZrO2 transformation.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 403: Symposium I – Polycrystalline Thin Films: Structure, Texture, Properties and Applications II , 1995 , 297
Copyright
Copyright © Materials Research Society 1996

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References

1. Scanlan, C.M., Gajdardziska-Josifovska, M., and Aita, C.R., Appl. Phys. Lett. 64, 3548 (1994).Google Scholar
2. Aita, C.R., U.S. Patent No. 5472795 (5 December 1995).Google Scholar
3. Scanlan, C.M., Wiggins, M.D., Gajdardziska-Josifovska, M., and Aita, C.R., MRS Proceedings 343, 481 (1994).Google Scholar
4. See, for example, Green, D.J., Hannink, R.H.J., Swain, M.V., Transformation Toughening of Ceramics (CRC Press, Boca Raton, FL, 1989).Google Scholar
5. Gajdardziska-Josifovska, M. and Aita, C.R., J. Appl. Phys., in press.Google Scholar
6. deRuijter, W.J., Gajdardziska-Josifovska, M., McCartney, M.R., Sharma, R., Smith, D.J., and Weiss, J.K., Scanning Microsc. 6, 347 (1992).Google Scholar
7. Aita, C.R., Wiggins, M.D., Whig, R., Scanlan, C.M., and Gajdardziska-Josifovska, M., J. Appl. Phys., in press.Google Scholar