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High Rate Deposition of Hydrogenated Amorphous Silicon Films by ECR Plasma CVD

  • S. Ozaki (a1), T. Akahori (a1), T. Tani (a1) and S. Nakayama (a1)

Abstract

A new electron cyclotron resonance (ECR) plasma CVD system has been developed in order to obtain high deposition rates. By using this system, hydrogenated amorphous silicon (a-Si:H) films have been prepared at a deposition rate of 1.0. μ m/min. The utilization efficiency of SiH4 gas is 16% under such conditions. Films prepared at 1.0 μ m/min have high photoconductivity (σ ph) of 10-6 S/cm and low dark conductivity (σ d) of 10-12 S/cm, leading to a high photosensitivity of σ ph/σ d=106. Both high microwave power and high SiH4 gas flow rates are essential to the high rate deposition of sufficiently photosensitive a-Si:H films. Annealing at 300° C improves the photosensitivity up to σ ph/σ d=107.

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1. Tomiyama, S. and Ozawa, T., DOE Report No.SERI-CP-211–3086-REV-3–87, 1987.
2. Chung, H.Y. and Sun, Y.Y., Electronics Lett. 23 (5), 228230 (1987).
3. Kobayashi, K., Hayama, M., Kawamoto, S. and Miki, H., Jpn. J. Appl. Phys. 26 (2), 202208 (1987).
4. Kitagawa, M., Ishihara, S., Setune, K., Manabe, Y. and Hirao, T., Jpn. J. Appl. Phys. 26 (4),L231–L233 (1987).
5. Akiyama, K., Tanaka, E., Takimoto, A. and Watanabe, M., Jpn. J. Appl. Phys. 27 (12), 21922198 (1988).
6. Fang, C.J., Gruntz, K.J., Ley, L. and Cardona, M., J. Non-Cryst. Solids 35–36, 255 (1980)
7. Matsuo, S. and Adachi, Y., Jpn. J. Appl. Phys. 21, L4 (1982)
8. Matsuo, S. and Kiuchi, M., Jpn. J. Appl. Phys. 22 (4), L210–L212 (1983)
9. Matsuda, A., Proc. 10th Syrup. on Ion Sources and Ion-Assisted Technology(ISIAT)'86 Tokyo, 331340 (1986)

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High Rate Deposition of Hydrogenated Amorphous Silicon Films by ECR Plasma CVD

  • S. Ozaki (a1), T. Akahori (a1), T. Tani (a1) and S. Nakayama (a1)

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