Skip to main content Accessibility help

High Quality Microcrystalline Silicon-Carbide Films Prepared by Photo-CVD Method Using Ethylene Gas as a Carbon Source

  • Seung Yeop Myong (a1), Hyung Kew Lee (a1), Euisik Yoon (a1) and Koeng Su Lim (a1)


Hydrogenated boron-doped microcrystalline silicon-carbide (p-μc-SiC:H) films were grown by a photo chemical vapor deposition (photo-CVD) method from silane (SiH4), hydrogen (H2), diborane (B2H6), and ethylene (C2H4) gases. Since the photo-CVD is a mild process (~10mW/cm2), we can avoid the ion damage of the film, which is inevitable during the deposition of μc-SiC:H employing conventional PECVD technique. A dark conductivity as high as 5 × 10-1 S/cm, together with an optical bandgap of 2 eV, was obtained by the C2H4 addition, which is the first approach in photo-CVD systems. From the Raman and FTIR spectra, it is clear that our p-μc-SiC:H films are made up of crystalline silicon grains embedded in amorphous silicon-carbide tissue. We investigate the role of the hydrogen dilution and ethylene addition on the electrical, optical, and structural properties of p-μc-SiC:H films.



Hide All
1. Jang, J. H. and Lim, K. S., Jpn. J. Appl. Phys. 36, L1082 (1997); 36, 6230 (1997); Appl.Phys. Lett. 71, 1846 (1997).
2. Lee, J. W. and Lim, K. S., Appl. Phys. Lett. 68, 1031 (1996); 69, 547 (1996); J. Appl. Phys. 81(5), 2432 (1997).
3. Tawada, Y., Tsuge, K., Kondo, M., Okamoto, H., and Hamakawa, Y., J. Appl. Phys. 53, 5273 (1982).
4. Goldstein, B. and Dickson, C. R., Appl. Phys. Lett. 53, 2672 (1988).
5. Demichelis, F., Pirri, C. F. and Tresso, E., Phil. Mag. B 67, 331 (1993).
6. Fluckiger, R., Meier, J., Shah, A., Pohl, J., Tzolov, M. and Carius, R., Mater. Res. Soc. Symp. Proc. 358, 793 (1995).
7. Hamakawa, Y., Matsumoto, Y., Hirata, G. and Okamoto, H., Mater. Res. Soc. Symp. Proc. 164, 291 (1990).
8. Dasgupta, A., Ghosh, S. and Ray, S., J. Mater. Sci. Lett. 14, 1037 (1995).
9. Cho, W. Y. and Lim, K. S., Jpn. J. Appl. Phys. 36, 1094 (1997).
10. Campbell, I. H. and Fauchet, P. M., Solid State Commun. 58, 739 (1986); CRC Crit. Rev. Solid State Mater. Sci. 14, S79 (1988).
11. Ghosh, S., De, A., Ray, S. and Bama, A. K., J. Appl. Phys. 71, 5205 (1992)
12. Matsuda, A., J. Non-Cryst. Solids 59&60, 767 (1983)
13. Ambrosone, G., Catalanotti, S., Coscia, U., Mormone, S., Cutolo, A., and Breglio, G., presented at the 2nd World Conf. and Exhib. on PVSEC, Vienna, Austria, 1998 (unpublished).


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed