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High Performance of Y-doped Sn-Zn-O Films Fabricated by Solution-process for Amorphous Thin Film Transistors

  • Yunxuan Yu (a1), Xian Gong (a1), Dong Liu (a1) (a2), Yan Wang (a1) and Jinfeng Kang (a1)...


The effect of Y dopant incorporated into ZTO with different Y ratios in Y-ZTO system on the performances of ZTO-based TFTs is investigated by using sol-gel process. The proper Y doped ZTO present both high film crystallization temperature and superior electrical properties as an active channel layer of TFTs. The fabricated YZTO-based TFTs with 11% Y show the excellent devices performance such as the channel field effect mobility of 1.756 cm2/Vs, SS of 2.13 V/dec, threshold voltage of 0.8V and on/off ratio of 3.12×106.


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[1] Hyung Lim, Jun, Hyun Shim, Jong, APPLIED PHYSICS LETTERS 95, 012108 2009
[2] Fortunato*, E., Barquinha, P., Martins, R., Advanced Materials, Volume 24, Issue 22, pages 29452986, June 12, 2012 10.1002/adma.201103228
[3] Seo, Seok-Jun,JOURNAL OF PHYSICS D: APPLIED PHYSICS42 (2009) 035106 (5pp)10.1088/0022-3727/42/3/035106
[4] Hong Jun, LeeJournal of the Korean Physical Society April 2013, Volume 62, Issue 8, pp 11761182
[5] Ting∗, Chu-Chi;, Chang, Shiep-Ping, Li, Wei-Yang, Wang, Ching-Hua, Applied Surface Science, 284(2013) 397404, July 29, 2013 10.1016/j.apsusc.2013.07.111
[6] Young Koo, Chang, Song, Keunkyu, Jung, Yangho, Yang, Wooseok, Kim, Seung-Hyun, Jeong, Sunho, and Moon, Jooho, ACS Appl. Mater. Interfaces, 2012, 4(3), pp 14561461
[7] Joon Kim, Si, et al. ., Journal of Crystal Growth 326 (2011) 163165.
[8] Jeong, W. H. et al. ., Thin Solid Films. 519(2011)57405743.10.1016/j.tsf.2010.12.210
[9] Yong Chong, Ho, et al. ., Appl. Phys. Lett. 99, 161908 (2011).10.1063/1.3655197
[10] Hyun Yoon, Doo, et al. ., Journal of Crystal Growth 326 (2011) 171174.10.1016/j.jcrysgro.2011.01.090
[11] Shin, Hyun Soo, Kim, Gun Hee, Jeong, Woong Hee, Ahnl, Byung Du, and Kim, Hyun Jae, Japanese Journal of Applied Physics 49 (2010) 03CB01



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