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High Deposition Rate of Microcrystalline Silicon for n-i-p Solar Cell by Using VHF PECVD Method

  • Jun-Chin Liu (a1), Chin-jeng Huang (a2), Techi Wong (a3), Jian-Shu Wu (a4), Yih-Rong Luo (a5) and Chi-Lin Chen (a6)...

Abstract

P doped, intrinsic, and n doped microcrystalline silicon (μc-Si) thin films were successfully synthesized on 10×10 cm2 transparent conductive oxide (TCO) /glass substrate by using a Very High Frequency Plasma Enhanced Chemical Vapor Deposition (VHF-PECVD, 80MHz) single chamber system. The crystal fraction of p and n type μc-Si:H with a thickness of 100nm was over 70% and 80%, respectively. Intrinsic μc-Si:H was deposited at a substrate temperature of 250°C with a high deposition rate over 1 nm/s. Photo-current/dark-current ratio of intrinsic μc-Si:H was higher than 102. The optimum cell initial efficiency of μc-Si:H single junction solar cell had been achieved 7.03 % so far.

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1. Yamamoto, K., et al., conference paper presented in WCEPC-3, Osaka, Japan, 1218, (2003)
2. Vetterl, O., Hapke, P., Finger, F, Houben, L., Luysberg, M., Wanger, H., Journal of Non-crystalline solids, 227–230, 866 (1998)10.1016/S0022-3093(98)00198-7
3. Nakahata, K., Ro, K., Kamiya, T., Fortmann, C. M., Shimizu, I., Japanese Journal of Applied Physics, 38, 5762 (1999).
4. Terasa, R. et al., Journal of non-crystalline solids, 266–269, 9599 (2000)10.1016/S0022-3093(99)00746-2
5. Koh, J. et al., Journal of non-crystalline solids, 266–269, 4347 (2000)
6. Stiebig, H. et al., Solar Energy Materials and Solar cells, 48, 351363 (1997)10.1016/S0927-0248(97)00147-5
7. Kocka, J. et al., Solar Energy Materials and Solar cells, 78, 493512 (1997)
8. Terasa, R. et al., Solar Energy Materials and Solar cells, 46, 157172 (1997)

Keywords

High Deposition Rate of Microcrystalline Silicon for n-i-p Solar Cell by Using VHF PECVD Method

  • Jun-Chin Liu (a1), Chin-jeng Huang (a2), Techi Wong (a3), Jian-Shu Wu (a4), Yih-Rong Luo (a5) and Chi-Lin Chen (a6)...

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