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Heteroepitaxial Growth of Transition-Metal Nitride Films

  • M. Shinn (a1), P.B. Mirkarimi (a1) and S.A. Barnett (a1)


The nucleation of epitaxial transition-metal nitride films with different lattice mismatch and growth of the corresponding supcrlattices were studied. In-situ Auger electron spectroscopy (AES) was used to characterize the nucleation mechanisms of V0.3Nb0.7N films on TiN (1.7% mismatch), TiN films on VN (2.4% mismatch), TiN films on NbN (3.6% mismatch), NbN films on VN (5.7% mismatch), and VN films on NbN grown by ultra-high vacuum reactive magnetron sputtering. The initial growth mechanism was layer-by-layer for mismatch values up to 3.6%, but three-dimensional island nucleation occurred for 5.7% mismatch. Scanning tunneling microscopy (STM) observations of NbN films showed threedimensional islands, confirming the AES results. X-ray diffraction spectra from the corresponding superlattices showed strong superlattice reflections except for the large-mismatch NbN/VN combination. Cross-sctional transmission electron microscopy studies showed that the superlattice layers were.velldefined and planar for low mismatch, but were irregular and non-planar for VN/NbN, in agreement with the X-ray, AES, and STM results. The maximum lattice mismatch for epitaxial nitride superlattice growth was thus limited by island nucleation and in the range from 3.6 - 5.7%.



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1. Barnett, S.A., “Deposition and Mechanical Properties of Superlattice Thin Films”, in Physics of Thin Films, edited by Vossen, J.L. and Francobe, M., in press.
2. Greer, A.L. and Spaepen, F.. Ch. 11 in Synthetic Modulated Structures, edited by Chang, L.L. and Giessen, B.C. (Academic Press, New York, 1985).
3.see, for example, Snyder, C.W., Orr, B.G., Kessler, D., and Sander, L.M., Phy. Rev. Lett. 66, 3032 (1991).
4. Mirkarimi, P.B., Hultman, L., and Barnett, S.A., Appl. Phys. Lett. 57, 2654 (1990).
5. Helmersson, U., Todorova, S., Barnett, S.A., Markert, L.C., and Greene, J.E., J. Appl. Phys. 62, 481 (1987).
6. Shinn, M., Hultman, L., and Barnett, S.A., J. Mater, Res. 7, 901 (1992).
7. Gray, K.E., Kampwirth, R.T., Murduck, J.M., and Capone, D.W. II, Physica C 152, 445 (1988)
8. Shinn, M., Hong, B.-S., and Bamett, S.A., unpublished.
9. Mirkarimi, P.B., Barnett, S.A., Hubbard, K.M., Jervis, T.R., and Hultman, L., unpublished.
10. Benesovsky, F., Kieffer, R., and Ettmayer, P., “Nitrides” in Encyclopedia of Chemical Technology, Vol. 15, 3rd ed. (John Wiley, New York, 1981).
11. Jackson, D.C., Gallon, E., and Chambers, A., Surface Sci. 36, 381 (1973).
12. Mirkarimi, P.B., Shinn, M., and Barnett, S.A., J. Vac. Sci. Technol. A10, 75 (1992).
13. Somorjai, G.A., Ch.2 in Chemistry in Two -Dimensions: Surfaces, edited by Somorjai, G.A. (Cornell University Press, Ithaca, 1981).
14. Venables, J.A., Spiller, G.D.T., and Hanbucken, M., Rep. Prog. Phys. 47, 399 (1984).
15. Spencer, B.J., Voorhees, P.W., Davis, S.H., Phys. Rev. Lett. 67, 3696 (1991).
16. Choi, C.-H., Ai, R., and Barnett, S.A., Phys. Rev. Lett. 67, 2826 (1991).

Heteroepitaxial Growth of Transition-Metal Nitride Films

  • M. Shinn (a1), P.B. Mirkarimi (a1) and S.A. Barnett (a1)


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