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He-Dilution to Increase Deposition Rate and Feedstock Utilization During the Growth of a-Si:H and a-SiGe:H Alloys

Published online by Cambridge University Press:  15 February 2011

A. R. Middya ,
G. Wood ,
G. H. Lin  and
D. E. Carlson
A. R. Middya
Affiliation:
Solarex, A Business Unit of BPAmoco Solar, 3601 LaGrange Parkway, Toano, VA 23168
G. Wood
Affiliation:
Solarex, A Business Unit of BPAmoco Solar, 3601 LaGrange Parkway, Toano, VA 23168
G. H. Lin
Affiliation:
Solarex, A Business Unit of BPAmoco Solar, 3601 LaGrange Parkway, Toano, VA 23168
D. E. Carlson
Affiliation:
Solarex, A Business Unit of BPAmoco Solar, 3601 LaGrange Parkway, Toano, VA 23168
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Abstract

We report on the development of helium diluted a-Si:H and a-SiGe:H solar cells with higher deposition rates and better feedstock utilization than devices made with hydrogen dilution. Both the initial and the stabilized efficiencies of the He-diluted single-junction aSi:H and a-SiGe:H cells are similar to those of hydrogen-diluted cells with state-of-the-art intrinsic materials. The total fabrication time for tandem cells has been reduced by 17% by using helium dilution without loss in initial and stabilized efficiency.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 557: Symposium A – Amorphous and Heterogeneous Silicon Thin Films—Fundamentals to Devices—1999 , 1999 , 151
Copyright
Copyright © Materials Research Society 1999

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