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He-Dilution to Increase Deposition Rate and Feedstock Utilization During the Growth of a-Si:H and a-SiGe:H Alloys

  • A. R. Middya (a1), G. Wood (a1), G. H. Lin (a1) and D. E. Carlson (a1)

Abstract

We report on the development of helium diluted a-Si:H and a-SiGe:H solar cells with higher deposition rates and better feedstock utilization than devices made with hydrogen dilution. Both the initial and the stabilized efficiencies of the He-diluted single-junction aSi:H and a-SiGe:H cells are similar to those of hydrogen-diluted cells with state-of-the-art intrinsic materials. The total fabrication time for tandem cells has been reduced by 17% by using helium dilution without loss in initial and stabilized efficiency.

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