Skip to main content Accessibility help

Growth of Large Grain Polycrystalline Silicon Thin Film on Soda-lime Glass at Low Temperature for Solar Cell Applications

  • K. Wang (a1) and K. H. Wong (a1)


High quality polycrystalline silicon (poly-Si) thin film solar cell was successfully fabricated on soda-lime glass substrates by electron beam (Ebeam) evaporation at low processing temperature. The initial poly-Si seed layer (p+-type 0.5 μm thick) was grown via the aluminum induced crystallization (AIC) method at 450 °C. Prominent interdiffusion and Si crystallization have been observed. X-ray diffraction (XRD) shows that (111) is the dominating crystalline orientation. Post annealing at 450 °C for six hours has produced densely packed Si grains with dimension of more than 10 μm in the plane of the film. Non-destructive Raman spectroscopy reveals the remarkable crystalline improvement for samples after thermal treatment. After removing the top diffused Al by chemical means, an absorber layer (p-type) of 0.9 μm thick was subsequently deposited onto the seed layer by Ebeam evaporation at 500 °C. Transmission electron microscopy (TEM) confirmed good homo-epitaxial growth. Without breaking the high vacuum, an n-type amorphous Si (a-Si) layer (0.7 μm thick) was coated onto the absorber layer to form p-n junction. The corresponding I-V characteristics suggest that our low temperature processing technique is applicable for production of poly-Si thin film solar cell on low cost substrates.



Hide All
1. Müller, A., Ghosh, M., Sonnenschein, R. and Woditsch, P., Mater. Sci. Eng. B 134, 257 (2006).10.1016/j.mseb.2006.06.054
2. Hammond, A. L., Science 178, 732 (1972).10.1126/science.178.4062.732
3. Shah, A., Torres, P., Tscharner, R., Wyrsch, N. and Keppner, H., Science 285, 692 (1999).10.1126/science.285.5428.692
4. Green, M., Appl. Phys. A: Mater. Sci. & Process. 96, 153 (2009).10.1007/s00339-009-5090-9
5. Tan, Z., Heald, S. M., Rapposch, M., Bouldin, C. E. and Woicik, J. C., Phys. Rev. B 46, 9505 (1992).10.1103/PhysRevB.46.9505
6. Jin, Z., Bhat, G. A., Yeung, M., Kwok, H. S. and Wong, M., J. Appl. Phys. 84, 194 (1998).10.1063/1.368016
7. Nast, O. and Hartmann, A. J., J. Appl. Phys. 88, 716 (2000).10.1063/1.373727
8. Guliants, E. A. and Anderson, W. A., J. Appl. Phys. 89, 4648 (2001).10.1063/1.1359150
9. He, D., Wang, J. Y. and Mittemeijer, E. J., J. Appl. Phys. 97, 093524 (2005).10.1063/1.1890449
10. Wang, Z. M., Wang, J. Y., Jeurgens, L. P. H. and Mittemeijer, E. J., Phys. Rev. B 77, 045424 (2008).10.1103/PhysRevB.77.045424
11. Hiraki, A., Surf. Sci. Rep. 3, 357 (1983).10.1016/0167-5729(84)90003-7
12. Gleiter, H. and Chalmer, B., Prog. Mater. Sci. 16, 77 (1972).
13. Kim, H., Kim, D., Lee, G., Kim, D. and Lee, S. H., Sol. Energy Mater. Sol. Cells 74, 323 (2002).10.1016/S0927-0248(02)00091-0
14. Gong, S. F., Hentzell, H. T. G., Robertsson, A. E., Hultman, L., Hornstrom, S.-E. and Radnoczi, G., J. Appl. Phys. 62, 3726 (1987).10.1063/1.339256
15. Huang, S., Xu, S., Cheng, Q., Long, J. and Ostrikov, K., Appl. Phys. A: Mater. Sci. & Process. 97, 375 (2009).10.1007/s00339-009-5220-4


Growth of Large Grain Polycrystalline Silicon Thin Film on Soda-lime Glass at Low Temperature for Solar Cell Applications

  • K. Wang (a1) and K. H. Wong (a1)


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed