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Growth of GaN on (100)Si Using a New C-H and N-H Free Single-Source Precursor

  • John Kouvetakis (a1), Jeffrey McMurran (a1), David B. Beach (a2) and David J. Smith (a3)

Abstract

We have demonstrated growth of crystalline GaN on Si substrates by using, for the first time, a novel inorganic precursor Cl2GaN3 and ultra-high-vacuum chemical vapor deposition techniques. Cross-sectional electron microscopy of the highly conformal films showed columnar growth of wurtzite GaN while Auger and RBS oxygen- and carbon-resonance spectroscopies showed that the films were pure and highly homogeneous. In addition to the high growth rates of 70–500 Å per minute, the low deposition temperature of 550–700 °C, and the nearly perfect GaN stoichiometry that we obtain, another notable advantage of our method is that it provides a carbon-free growth environment which is compatible with p-doping processes.

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1 Morkoc, H., Stritc, S., Gao, G. B., Lin, M. E., Sverdlov, B. and Bums, M., J. Appl. Phys. 76, 1763 (1994).
2 Nakamura, S., Scnoh, M., Iwasa, N. and Nagahama, S., Jap. J. Appl. Phys. 34, L797 (1995).
3 Lester, S. D., Ponce, F. A., Crawford, M. G. and Steigerwald, D. A., Appl. Phys. Lett. 66, 1249(1995) 1249.
4 Smith, D. J., Chandrasakher, D., Sverdlov, B., Botchkarev, A., Salvador, A. and Morkoc, H., Appl Phys. Lett. 67, 1830 (1995).
5 Sverdlov, B. N., Martin, G. A., Morkoc, H. and Smith, D. J., Appl. Phys. Lett. 67, 2063 (1995).
6 Andrews, J. E., Little John, M. A., J. Electrochem. Soc. 122, 1273 (1975).
7 Kouvetakis, J. and Beach, D. B., Chem. Mat. 1, 476 (1989).
8 Lakhotia, V., Neumayer, D. A., Cowley, A. H., Jones, R. A., and Ekerdt, J. G., Chem. of Mat. 3, 441(1995).

Growth of GaN on (100)Si Using a New C-H and N-H Free Single-Source Precursor

  • John Kouvetakis (a1), Jeffrey McMurran (a1), David B. Beach (a2) and David J. Smith (a3)

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