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Growth of Crystalline Superlattices of Aluminum Nitride/Zirconium Nitride on SI(111): Roughness and Layer Interruptions
Published online by Cambridge University Press: 21 February 2011
Abstract
We report on growth of crystalline superlattices of aluminum nitride/zirconium nitride on aluminum nitride buffered Si(111) substrates. We observed increased buffer layer surface roughness as compared with the buffer/Substrate interface. This roughness in turn influences the quality of the superlattice. We report results of surface morphology examination as a function of growth rate and substrate temperature.
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- Copyright © Materials Research Society 1992