Skip to main content Accessibility help
×
Home

Growth of AZO on flexible substrate using ALD system as a transparent conducting oxide for solar cells

  • Tara Dhakal (a1), Abhishek Nandur (a1), Rachel Christian (a1), Daniel Vanhart (a1), Parag Vasekar (a1) and Charles R. Westgate (a1)...

Abstract

Aluminum doped zinc oxide (AZO) thin film is gaining momentum as a transparent conducting oxide because its optical and electrical properties are optimal for a photovoltaic device. We report growth of AZO thin film using an Atomic Layer Deposition (ALD) system, which is known to deposit layers on a substrate with atomic layer precision. The precursors used for aluminum and zinc were Trimethylaluminum (TMA) and Dimethylzinc (DMZ) respectively. Alternating cycles of TMA and DMZ were introduced to the heated deposition chamber such that a desired aluminum doping was obtained on the AZO films grown. The films were grown on flexible substrates like PET and also on single crystalline Si(100) and float-glass substrates. An optimal aluminum doping (3 at.%) on the AZO film of thickness 575 nm gave a sheet resistance (Rs) of 97 Ω/□ with corresponding resistivity of 5.6 x 10-3 Ω.cm. The value of the carrier concentration and hall mobility were 1.86 x 1020 cm-3 and 6.5 cm2V-1s-1 respectively. Optical measurement showed 90% transmission in most of the visible spectrum. X-ray diffraction spectra of the film showed all characteristic ZnO hexagonal lattice peaks.

Copyright

References

Hide All
1. Hao, Xiao-Tao, Tan, Li-Wei, Ong, Kian-Soo, and Zhu, Furong, Journal of Crystal Growth 287, 44 (2006)
2. Murdoch, G. B., Hinds, S., Sargent, E. H., Tsang, S. W., Mordoukhovski, L., and Lu, Z. H., Appl. Phys. Lett. 94, 213301 (2009)
3. Vasekar, Parag S., Dhere, Neelkanth G., and Moutinho, Helio, Solar Energy, 83, 1566 (2009)
4. Sato, H, Minami, T, Takata, S, Miyata, T and Ishii, M, Thin Solid Films 236,14 (1993)
5. Jeong, S.H., Lee, J.W., Lee, S.B., Boo, J.H., Thin Solid Films, 435, 78 (2003)
6. Yang, Weifeng, Liu, Zhuguang, Peng, Dong-Liang, Zhang, Feng, Huang, Huolin, Xie, Yannan, Wu, Zhengyun, Applied Surface Science 255, 5669 (2009)
7. George, S. M., Ott, A. W., and Klaus, J. W., J. Phys. Chem. 100, 13121 (1996)
8. Elam, J. W. and Goerge, S. M., Chem. Mater. 15, 1020 (2003)
9. Dhakal, Tara, Mukherjee, Devajyoti, Hyde, Robert, Srikanth, Hariharan, Mukherjee, Pritish and Witanachchi, Sarath, Mater. Res. Soc. Symp. Proc. 1199, F0344 (2010)
10. Pei, Z.L., Zhang, X.B., Zhang, G.P., Gong, J., Sun, C., Huang, R.F., and Wen, L.S., Thin Solid Films 497, 20 (2006)

Keywords

Growth of AZO on flexible substrate using ALD system as a transparent conducting oxide for solar cells

  • Tara Dhakal (a1), Abhishek Nandur (a1), Rachel Christian (a1), Daniel Vanhart (a1), Parag Vasekar (a1) and Charles R. Westgate (a1)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed