Skip to main content Accessibility help

Growth And Characterization Of Amorphous Ain Thin Films By Reactive Magnetron Sputtering At Low Temperature

  • K. Gurumurugan (a1), Hong Chen (a1) and G. R. Harp (a1)


We present the first report of the preparation and characterization of α-AIN films using reactive magnetron sputtering at cryogenic temperature. By comparison, analogous films grown at room temperature were polycrystalline. The films were characterized using X-ray Diffraction (XRD), Scanning Electron Microscopy (SEM), Rutherford Backscattering Spectrometry (RBS), Infrared (IR) Spectroscopy and optical transmission. XRD studies on films grown at room temperature showed diffraction peaks corresponding to (100), (101), (102) and (210) planes. In contrast, no peaks were observed for AIN films formed at liquid nitrogen temperature confirming the amorphous nature of the films. Composition analysis using RBS showed the presence of Al and N in ˜1:1 stoichiometry. The films were highly transparent and the computed bandgaps of αand c-AIN films were 5.90 and 5.89 eV respectively. We also consider the possibilities of wet etching the AIN films in diluted KOH solution and the results are discussed.



Hide All
1. Yong, Yoon-Joong and Lee, Jai-Young, J. Vac. Sci. Technol. A 15, p. 390 (1997).
2. Zolper, J. C., Rieger, D. J., Baca, A. G., Pearton, S. J., Lee, J. W., and Stall, R. A., Appl. Phys. Lett. 69, p. 538 (1996).
3. Jones, K. A., Xie, K., Eckart, D. W., Wood, M. C., Talyansky, V., Vispute, R. D., Venkatesan, T., Wongchotigul, K., and Spencer, M., J. Appl. Phys. 83, p. 8010 (1998).
4. Nakamura, S., Mukai, T., and Senoh, M., J. Appl. Phys. 76, p. 8189 (1994).
5. Meng, W. J. and Doll, G. L., J. Appl. Phys. 79, p. 1788 (1996).
6. Rodíguez-Navarro, A., Otaño-Rivera, W., García-Ruiz, J. M., Messier, R., and Pilione, L. J., J. Mater. Res. 12, p. 1850 (1997).
7. Krupitskaya, Regina Y. and Auner, Gregory W., J. Appl. Phys. 84, p. 2861 (1998).
8. Dovidenko, K., Oktyabrsky, S., and Narayan, J., J. Appl. Phys. 79, p. 2439 (1996).
9. Jagannadham, K., Sharma, A. K., Wei, Q., Kalyanaraman, R., and Narayan, J., J. Vac. Sci. Technol. A 16, p. 2804 (1998).
10. Nonomura, S., Kobayashi, S., Gotoh, T., Hirata, S., Ohmori, T., Itoh, T., Nitta, S. and Morigaki, K., J. Non-Cryst. Solids 198–200, p. 174 (1996).
11. Stumm, P. and Drabold, D. A., Phy. Rev. Lett. 79, p. 677 (1997).
12. Powder Diffraction File, ASTM No.8-262 (Joint Committee on Powder Diffraction Standards, Philadelphia, 1960).
13. MacMillan, M. F., Devaty, R. P., and Choyke, W. J., Appl. Phys. Lett. 62, p. 750 (1993).
14. Sato, C., Boiadjiev, V., and Tysoe, W. T., Chem. Mater. 8, p. 2359 (1996).
15. Demiryont, H., Thompson, L. R., and Collins, G. J., Appl. Opt. 25, p.1311 (1986).
16. Swanepoel, R., J. Phys. E 16, p. 1214(1983).
17. Barrett, N. J., Grange, J. D., Sealy, B. J., and Stephens, K. G., J. Appl. Phys. 57, p. 5470 (1985).
18. Aita, C. R. and Gawlak, C. J., J. Vac. Sci. Technol. A1, p. 403(1983).
19. Kline, G. R. and Lakin, K. M., Appl. Phys. Lett. 43, p. 750(1983).
20. Mileham, J. R., Pearton, S. J., Abernathy, C. R., MacKenzie, J. D., Shul, R. J., and Kilcoyne, S. P., Appl. Phys. Lett. 67, p. 1119 (1995).
21. Pauleau, T., J. Electrochem. Soc. 129, p. 1045 (1982).


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed