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Grain Growth in Titanium Silicide Films During the Formation Reaction

  • Yunji L. Corcoran (a1), Alexander H. King (a1), Nimal deLanerolle (a2), Bonggi Kim (a2) and John Berg (a2)...

Abstract

Titanium films of 0.5 µm thickness were sputter deposited on silicon substrates. After rapid thermal annealing at temperatures ranging from 600°C to 850°C for times up to 45 seconds in nitrogen, transmission electron microscope (TEM) cross section specimens were made from the wafers. Grain sizes of the resulting titanium disilicide were measured from TEM cross section micrographs. The results show that C49-TiSi2 has a different grain growth rate than C54-TiSi2- Under our experimental conditions, C54-TiSi2 has a much higher growth rate. Titanium silicide on arsenic implanted silicon substrates shows a lower grain growth rate than that on unimplanted substrates under the same conditions. The thickness of the silicide layer was also measured for each specimen. The relationship of thickness and grain size will be discussed.

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1. Yakowitz, H. and Newbury, D. E., Scanning Electron Microscopy, Proceedings of the 9th Annual SEM Symposium, (1076) p. 151.
2. Bravman, J. and Sinclair, R. J., Electron Microsc. Tech., 1, 53 (1984).
3. Thompson, C. V. and Smith, H. I., Appl. Phys. Lett., 44, 603 (1984).
4. Mullins, W. W., Acta Metall., 6, 414 (1958).
5. Hillert, M., Acta Metall., 13, 227 (1965).
6. Corcoran, Y. L., King, A.H., deLanerolle, N., Kim, B., J. Elect. Mat. to be published.(1990)
7. Peterson, N. L., Inter.Met. Rev. 28, 65 (1983).
8. Pico, C. A. and Lagally, M. G., J. Appl. Phys. 64, 4957 (1988).

Grain Growth in Titanium Silicide Films During the Formation Reaction

  • Yunji L. Corcoran (a1), Alexander H. King (a1), Nimal deLanerolle (a2), Bonggi Kim (a2) and John Berg (a2)...

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