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Grain Enhancement of Polycrystalline Silicon Films Aided by Optical Excitation

  • B. L. Sopori (a1), W. Chen (a1), J. Alleman (a1), R. Matson (a1), N. M. Ravindra (a2) and T. Y. Tan (a3)...

Abstract

A new technique for making large-grain thin Si films is described in which optical excitation is used to enhance the grain growth. Grain sizes much larger than the film thickness can be obtained at low temperatures and in short process times. This method is well suited for making thin-film Si solar cells on low-temperature substrates.

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Grain Enhancement of Polycrystalline Silicon Films Aided by Optical Excitation

  • B. L. Sopori (a1), W. Chen (a1), J. Alleman (a1), R. Matson (a1), N. M. Ravindra (a2) and T. Y. Tan (a3)...

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