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Grain Boundary Sliding in Thin Substrate-Bonded AL Films

  • M. Prieler (a1), H.G. Bohn (a1), W. Schilling (a1) and H. Trinkaus (a1)

Abstract

A systematic investigation of the anelastic relaxation of thin Al films on Si substrates has been carried out. It was found that both the relaxation in bulk and thin film material can be explained by a model involving glide of grain boundaries (GBs). The mass transport necessary for the glide occurs via GB diffusion in the thin films and via lattice diffusion in the bulk material the different behavior being due to the more of two orders of magnitude smaller grains in the films. Internal friction thus provides a technique to measure diffusional parameters of GB diffusion in thin films.

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1 , T.S., Phys. Rev., 71, 533 (1947).
2 Mehrer, H., Stolica, N., and Stolwijk, N.A., in Landolt-Börnstein, New Series, III/26, (Springer, Berlin, 1990), p. 60.
3 Kaur, I. and Gust, W., Handbook of Grain and Interface Boundary Diffusion Data, (Ziegler Press, Stuttgart, 1989).
4 Berry, B.S. and Pritchet, W.C., J. de Physique, 42, C51111 (1981).
5 Bohn, H.G., Prieler, M., and Su, C.M., in Mechanical Properties and Deformation Behavior of Materials Having Ultra-fine Microstructures. edited by Nastasi, M.A., Parkin, D.M., and Gleiter, H. (Kluwer Academic Publishers, Dordrecht, 1993), p. 229.
6 Bohn, H.G. and Su, C.M., Mat. Res. Soc. Symp. Proc, Vol. 239, 215 (1992).
7 The unpatterned samples were kindly provided by Dr. Kücher, P., Siemens, AG, Munich.
8 Vollkommer, F., PhD thesis, RWTH Aachen; Berichte der Kernforschungsanlage Jülich, Jül-2321 (1989).
9 Vollkommer, F., Bohn, H.G., Robrock, K.-H., and Schilling, W., 28th Annual Proceedings Reliability Physics, p. 51 (1990).
10 Landau, L.D. and Lifschitz, E.M., Lehrbuch der theoretischen Physik. Bd. VII (Akademie Verlag, Berlin, 1970).
11 Su, C.M., private communication.
12 Su, C.M., Bohn, H.G., Robrock, K.-H., and Schilling, W., J. Appl. Phys., 70, 2086 (1991).
13 Nowick, A.S. and Berry, B.S., Anelastic Relaxation in Crystalline Solids (Academic Press, NY, 1972).
14 Su, C.M. and Bohn, H.G., Materials Science Forum, 119–121, 285 (1993).
15 Raj, R. and Ashby, M.F., Metallurgical Transactions 2, 1113 (1971); Acta met. 23, 653 (1975).
16 Trinkaus, H. and Yoo, M.H., Phil. Mag. A 57, 543 (1988).
17 Trinkaus, H., to be published.

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