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Grain Boundary Phase Analysis of Silicon Nitride by a Newly Developed 300kv Field-Emission Electron Microscope

Published online by Cambridge University Press:  21 February 2011

Y. Bando ,
H. Suematsu  and
M. Mitomo
Y. Bando
Affiliation:
National Institute for Research in Inorganic Materials, Namiki, Tsukuba, Ibaraki, 305 Japan
H. Suematsu
Affiliation:
National Institute for Research in Inorganic Materials, Namiki, Tsukuba, Ibaraki, 305 Japan
M. Mitomo
Affiliation:
National Institute for Research in Inorganic Materials, Namiki, Tsukuba, Ibaraki, 305 Japan
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Abstract

The grain boundary phase of silicon nitride containing additives Y2O3 and Nd2O3 has been studied by means of a newly developed 300kV field emission ATEM. The composition of the two-grain boundary phase of about 1 nm thick is successfully determined. It is then found that the compositions among the grain boundaries are not the same and the additives of Y2O3-Nd2O3 are poor in the two-grain boundary, while they are rich in the triple points.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 346: Symposium N – Better Ceramics Through Chemistry VI , 1994 , 733
Copyright
Copyright © Materials Research Society 1998

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References

REFERENCES

1 Lange, F.F., J. Am. Ceram. Soc. 65 [2] C-23 (1982)Google Scholar
2 Clarke, D.R., J. Am. Ceram. Soc. 70 [1] 15 (1987)Google Scholar
3 Marion, J.E., Hsueh, C.H. and Evans, A.G., J. Am. Ceram. Soc. 70 [10] 708 (1987)Google Scholar
4 Clarke, D.R., Ultramicroscopy 4, 33 (1979)Google Scholar
5 Tanaka, I., Pezzotti, G., Okamoto, T., Miyamoto, Y. and Koizumi, M., J. Am. Ceram. Soc. 72 [9] 1656 (1989)Google Scholar
6 Bando, Y., Mitomo, M. and Kitami, Y., J. Electron Microsc. 35, [4] 371 (1986)Google Scholar
7 Bando, Y., Kitami, Y., Tomita, T., Honda, T. and Ishida, Y., Jpn. J. Appl. Phys. 32 L1704 (1993)Google Scholar
8 Hirosaki, N., Inoue, Y. and Akimune, Y., J. Ceram. Soc. Jpn. 100 [5] 720 (1992)Google Scholar
9 Kleebe, H.-J., Cinibulk, M.K., Tanaka, I., Bruley, J., Cannon, R.M., Clarke, D.R., Hoffmann, M.J. and Rhule, M., Mat. Res. Soc. Symp. Proc. vol.287 65 (1993)Google Scholar