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Grain boundary Diffusion of Ni through Pd2Si

  • E. C. Zingu (a1) and J. W. Mayer (a1)

Abstract

Interdiffusion in the Si<100>/Pd2Si/Ni and Si<111>/Pd2Si/Ni thin film systems has been investigated using Rutherford backscattering spectrometry. Nickel is found to diffuse along the grain boundaries of polycrystalline Pd2Si upon which it accumulates at the Si<100>Pd2Si interface. The high mobility of Ni compared to that of si suggests that Pd diffuses faster than Si along the Pd2Si grain boundaries. An activation energy of 1.2 eV is determined for Ni grain boundary diffusion in Pd2Si.

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Grain boundary Diffusion of Ni through Pd2Si

  • E. C. Zingu (a1) and J. W. Mayer (a1)

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