Skip to main content Accessibility help
×
Home

GexSi1−x Waveguides Grown by Rapid Thermal Processing Chemical Vator Deposition

  • K. H. Jung (a1), R. A. Mayer (a1), T. Y. Hsieh (a1), J. C. Campbell (a1) and D. L. Kwong (a1)...

Abstract

We report the growth and characterization of GexSi1−x films for optical waveguiding. GexSi1−x/Si waveguides were grown by rapid thermal processing chemical vapor deposition. An average attenuation of 3.3 dB/cm was achieved for a 1 μm thick Ge0.04Si0.96 layer patterned into rib waveguides 2000 Å deep with widths of 5 μm. Directional couplers were also fabricated. Average coupling efficiencies of 85% were achieved for 1.5 μm interwaveguide separation.

Copyright

References

Hide All
[1] People, R., IEEE J. Quantum Electonics QE- 22, 1696 (1986).
[2] Soref, R. A., Namavar, F., and Lorenzo, J. P., Proc SPIE 1177, session 4, Boston, USA, 58 Sep 1989.
[3] Schuppen, B., Schmidtchen, J., and Petermann, K., Electronic Lett. 25, 1500 (1989).
[4] Splett, A., Schmidtchen, J., Schuüppert, B., Petermann, K., Kasper, E., and Kibbel, H., Electronic Lett. 26, 1035 (1990).
[5] Lee, S. K., Ku, Y. H., and Kwong, D. L., Appl. Phys. Lett. 54, 1775 (1989).
[6] Gibbons, J. F., Gronet, C. M., and Williams, K. E., Appl. Phys. Lett. 47, 721 (1985).
[7] Green, M. L., Brasen, D., Luftman, H., and Kannan, V. C., J. Appl. Phys. 65, 2558 (1989).
[8] Hsieh, T. Y., Jung, K. H., Kwong, D. L., and Lee, S. K., J. Electrochem. Soc. 138, 1188 (1991).
[9] Jung, K. H., Kim, Y. M., and Kwong, D. L., Appl. Phys. Lett. 56, 1775 (1990).
[10] Austin, M. W. and Kemeny, P. C., ECIO '85, Springer-Verlag, 140 (1985).
[11] Jung, K. H., Hsieh, T. Y., Kwong, D. L., to be published in Appl. Phys. Lett. 56, (1991).

GexSi1−x Waveguides Grown by Rapid Thermal Processing Chemical Vator Deposition

  • K. H. Jung (a1), R. A. Mayer (a1), T. Y. Hsieh (a1), J. C. Campbell (a1) and D. L. Kwong (a1)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed