Skip to main content Accessibility help
×
Home

Gettering of Metallic Impurities in Silicon

  • A. Ourmazd (a1) and W. Schröter (a2)

Abstract

We report the results of a study of the microstructural changes brought about by the gettering of metallic impurities in silicon. Phosphorus gettering proceeds by the formation of metal disilicides at the silicon/phosphosilicate glass interface. By showing that iron is strongly localized at the interface by phosphorus gettering, we present the first evidence that phosphorus gettering can proceed independently of Fermi level effects. Our first results on the intrinsic gettering of nickel lend support to the notion that the emission of silicon interstitials brought about by phosphorus diffusion (and SiP formation), or intrinsic gettering (SiO x , formation), plays an important role in the gettering process.

Copyright

References

Hide All
[1] Tseng, W. F., Koji, T., Mayer, J. W. and Seidel, T. E., Appl. Phys. Lett. 33, 442 (1978).10.1063/1.90371
[2] Lecrosnier, D., Paugam, J., Pelous, G., Richou, F. and Salvi, M., J. Appl. Phys. 52,5090 (1981).10.1063/1.329407
[3] Seidel, T. E., Meek, R. L. and Cullis, A. G., J. Appl. Phys. 46, 600 (1975).10.1063/1.321664
[4] Shaikh, A. A., Doctoral Thesis, University of Göttingen (1983).
[5] Tan, T. Y., Gardner, E. E. and Tice, W. K., Appl. Phys. Lett. 30, 175 (1977).10.1063/1.89340
[6] Bourret, A., Thibault-Desseaux, J. and Seidman, D. N., J. Appl. Phys. 55, 825 (1984).10.1063/1.333178
[7] Bourret, A. and Schröter, W., Ultramicroscopy, 14, 97 (1984).10.1016/0304-3991(84)90113-X
[8] Gibson, J. M., Tung, R. T. and Poate, J. M., Defects in Semiconductors II, ed. Mahajan, S. and Corbett, J. W. (North-Holland, New York) p. 395 (1983).
[9] Tu, K. N. and Mayer, J. W., Thin Films; Interdiffusion and Reactions, ed. Poate, , Tu, and Mayer, (Wiley) p. 359 (1978).

Gettering of Metallic Impurities in Silicon

  • A. Ourmazd (a1) and W. Schröter (a2)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed