Skip to main content Accessibility help
×
Home

Ge and Gesl Heteroepitaxy on Si(100) by MBE

  • D. C. Houghton (a1), J.-M. Baribeau (a1), P. Maigne (a1), T. E. Jackman (a1), I. C. Bassignana (a2), C. C. Tan (a2) and R. Holt (a3)...

Abstract

We have grown a series of Ge and graded Si1-xGex epilayers on (100)Si substrates by MBE under different conditions. The quality of the layers has been characterized by cross-sectional TEM, Rutherford backscattering/ channeling and x-ray diffraction. This work addresses the optimization of growth temperature, (300–700°C) an evaluation of compositional grading, the effect of the incorporation of strained layer superlattice dislocation filters and post growth anneal cycles. Particular attention has been paid to grading GexSi1-x, x = 0 to 1 and the growth morphology of intermediate alloy epilayers.

Copyright

References

Hide All
1. Fisher, R., Masselink, W.T., Henderson, T., McGlinn, T.C., Kein, M.V., Morkoç, H., Mazur, J.H. and Washburn, J.. J. Appl. Phys. 58, (1985), 374 and Appl. Phys. Lett. 48 (1986) 1360.
2. Sheldon, P., Yacobi, B.G., Jones, K.M. and Dunlovy, D.J.. J. Appl. Phys. 58, (1985), 4186.
3. Metze, G.M., Choi, H.K. and Tsaur, B.Y.. Apply. Phys. Lett. 45 (1984), 1107.
4. Baribeau, J.-M., Jackman, T.E, Maigné, P., Houghton, D.C. and Denhoff, M.W.. AVS Ann. Meeting Baltimore, Oct. 1986.
5. Choi, H.K., Tsaur, B.-Y., Metze, G.M. and Turner, G.W.. IEEE Electro Device Lett. 5, (1984), 207.
6. Van der Ziel, J.P., Dupuis, R.D. and Bean, J.C.. Appl. Phys. Lett. 48, (1986), 1713.
7. Bean, J.C., Feldman, L.C., Fiory, A.T., Nakahara, S. and Robinson, I.K.. J. Vac. Sci. Technol. A2, (1984), 436.
8. Macrander, A.T., Dupuis, R.D., Bean, J.C. and Brown, J.M.. TMS AIME-MRS Conf. Proc. AT&T, May 1–2, (1986).
9. Ota, Y., Thin Solid Films 106, (1983), 1128.
10. Materials Analysis by Ion Channeling, Feldman, L.C., Mayer, J.W. and Picraux, S.T., Academic Press (1982).
11. Hirsch, P.B., “Mosaic Structure”, Ch. 6 in Progress in Metal Physics eds. Chalmers, B. and King, R.. (New York, N.Y. Pergaraon, 1956).

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed