The collision dynamics of Cu, Ni or Al clusters containing 92 atoms with substrates of these same metals were studied using molecular dynamics computer simulations. For energies of 1.0 keV or 326 eV, diverse behavior was observed, depending sensitively on the relative properties of the cluster and substrate. For Cu clusters impacting Cu substrates, the cluster plastically deforms the substrate and creates a deep crater with substrate atoms forming a ridge at the periphery of the crater. In contrast, Al clusters do not much deform Ni substrates, but rather tend to spread epitaxially over the surface. Several Al atoms dissociate from the cluster, and either reflect into the vacuum or scatter over the surface. 326 eV Ni clusters embed themselves almost completely within Al substrates and form localized amorphous zones.