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Frictional behavior and particle adhesion of abrasive particles during Cu CMP

  • Yi-Koan Hong (a1), Ja-Hyung Han (a1), Jae-Hoon Song (a1) and Jin-Goo Park (a1)

Abstract

The friction behavior and adhesion of abrasive particles were experimentally investigated during Cu CMP process. The highest particle adhesion force was measured in alumina slurry without citric acid. However, the alumina slurry with addition of citric acid had the lowest particle adhesion due to the adsorption of citrate ions on the alumina surfaces. While citrate ions could be easily adsorbed on alumina particles, silica particle showed the least effect on adsorption in citric acid solutions. The magnitude of adsorptions of citrate ions on the particle surfaces had significant effect on frictional behavior as well as adhesion force. Higher particle adhesion force resulted in higher friction, particle contamination and scratches in CMP process. It indicates that the magnitudes of particle adhesions on wafer surfaces in slurries can be directly related to the frictional behavior during CMP process.

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Frictional behavior and particle adhesion of abrasive particles during Cu CMP

  • Yi-Koan Hong (a1), Ja-Hyung Han (a1), Jae-Hoon Song (a1) and Jin-Goo Park (a1)

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