Skip to main content Accessibility help
×
Home

Formation of Nickel Silicides on Ion-Amorphized Silicon

  • B. Mohadjeri (a1), J. Linnros (a2), B. G. Svensson (a1), M. ÖStling (a1), S. Johanssons (a3) and F. M. D'Heurle (a1) (a4)...

Abstract

The formation of NiSi and NiSi2 upon annealing of an ion-amorphized Ni/Si structure has been studied by various surface analytical techniques to characterize the morphology, stoichiometry and interface sharpness of the NiSi2 layer. In comparison with reactions of nickel on crystalline silicon (c-Si), sharpening 0ofthe NiSi2/C-Si interface is obtained for appropriate amorphization depths. Moreover, the surface roughness of the NiSi2 films is significantly reduced by implantation. The NiSi2 formation temperature is, however, not reduced as observed for structures with nickel deposited on amorphous silicon prepared by evaporation. This dissimilarity can be explained by an unexpected low crystallization temperature or the ion-amorphized structure, where Ni-ennanced solid phase epitaxy occurs at a temperature as low as 425°C.

Copyright

References

Hide All
[1] Mayer, J. W. and Lau, S. S., Electronic Materials Science, (Mc Milian, New York, 1990).
[2] Ishiwara, H., Saitoh, S., and Hikosaka, K., Jpn. J. Appl. Phys. 20, 843 (1981).
[3] Lien, C. -D., Nicolet, M. -A., and Lau, S. S., Phys. Stat. Sol. (a) 81, 123 (1984).
[4] d'Heurle, F. M., J. Mater. Res. 3, 167 (1988).
[5] Mohadjeri, B., Linnros, J., Svensson, B. G., and Östling, M., Phys. Rev. Lett. 68, 1872 (1992).
[6] Olson, G. L. and Roth, J. A., Materials Science Reports 3 (North-Holland, Amsterdam, 1988) pp. 178.
[7] Chiù, K. C. R., Poate, J. M., Rowe, J. E., Sheng, T. T., and Cullis, A. G., Appl. Phys. Lett. 38, 988 (1981).
[8] Xiao, Z. G., Honeycutt, J. W., and Rozgonyi, G. A., Mat. Res. Soc. Symp. Proc. 202, 259 (1991).
[9] Hayzelden, C., Batstone, J. L. and Cammarata, R. C., Appl. Phys. Lett. 60, 225 (1992).

Formation of Nickel Silicides on Ion-Amorphized Silicon

  • B. Mohadjeri (a1), J. Linnros (a2), B. G. Svensson (a1), M. ÖStling (a1), S. Johanssons (a3) and F. M. D'Heurle (a1) (a4)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed