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Formation of Carbon Nanotube by using RF plasma CVD equipment from Acetylene and Hydrogen gases

  • Y. Show (a1), T. Matsukawa (a1), M. Iwase (a2) and T. Izumi (a1)

Abstract

The carbon nanotubes were grown on the round Ni particles at the growth temperature below 60 °C by the radio frequency plasma CVD equipment from the acetylene and the hydrogen gases. For the low growth of the carbon nanotubes, the acetylene concentration in the hydrogen gas was essential parameter. In the case of the high acetylene concentration above 30 %, the cauliflower-like carbon film was grown. On the other hand, the low acetylene concentration of 10 % realized the low temperature growth of the carbon nanotubes.

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[1] Saito, Y., Hamaguchi, K., Nishino, T., Hata, K., Tohji, K., Kasuya, A. and Nishina, Y., Jpn. J. Appl. Phys., Part 2 36, K1340 (1997)
[2] Bonard, J.-M., Salvetat, J. -P., Stochli, T., Heer, W. A. de, Forro, L. and Chatelain, A., Appl. Phys. Lett. 73, 918 (1998)
[3] Saito, Y., Uemura, S. and Hamaguchi, K., Jpn. J. Appl. Phys., Part 2 37, L346 (1998)
[4] Wang, Q. H., Setlur, A. A., Lauerhaas, J. M., Dai, J. Y., Seelig, E. W. and Chang, R. P. H., Appl. Phys. Lett. 72, 2912 (1998)
[5] Murakami, H., Hirakawa, M., Tanaka, C. and Yamakawa, H., Appl. Phys. Lett. 76, 1776 (2000)
[6] Bower, C., Zhou, O., Zhu, W., Werder, D. J. and Jin, S., Appl. Phys. Lett. 77, 2767 (2000)
[7] Yudasaka, M., Kikuchi, R., Matsui, T., Ohki, Y., Yoshimura, S. and Ota, E., Appl. Phys. Lett. 67, 2477 (1995)
[8] Yudasaka, M., Kikuchi, R., Ohki, Y., Ota, E. and Yoshimura, S., Appl. Phys. Lett. 70, 1817 (1997)
[9] Choi, Y. C., Shin, Y. M., Lee, Y. H., Lee, B. S., Park, G., Choi, W. B., Lee, N. S. and Kim, J. M., Appli, Phys. Lett. 76, 2367 (2000)

Formation of Carbon Nanotube by using RF plasma CVD equipment from Acetylene and Hydrogen gases

  • Y. Show (a1), T. Matsukawa (a1), M. Iwase (a2) and T. Izumi (a1)

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