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Formation of buried α- and β- FeSi2 in (100) Si by high dose ion implantation

  • K. Maex (a1), A. Lauwers (a1), M. Van Hove (a1), W. Vandervorst (a1) and M. Van Rossum (a1)...

Abstract

A study on ion beam synthesis of buried α- and β-FeSi2 in >100< Si is presented. Phase formation has been investigated as a function of implant and anneal temperature. Layer characterization was performed by RBS, XRD, resistivity, spreading resistance and Hall effect measurements. Orientation effects in the layers have been observed depending on the implant temperature. Transport measurements show that die holes are the majority carriers in the semiconducting layers.

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1. Oostra, D. J., Vandenhoudt, D. E. W., Bulle-Lieuwma, C. W. T. and Naburgh, E. P., Appl. Phys. Lett. 59 (1991) 1737.
2. Radermacher, K., Mantl, S., Dieker, Ch. and Lüth, H., Appl. Phys. Lett. 59 (1991) 2145.
3. Gerthsen, D., Rademacher, K., Dieker, Ch. and Mantl, S., J. Appl. Phys. 71 (1992) 3788.
4. Hunt, T. D., Sealy, B. J., Reeson, K. J., Gwilliam, R. M., Homewood, K. P., Wilson, R. J., Meekison, C. D. and Booker, C. R., presentend at the Ion Implantation Technology Conference, 1992, to be published.
5. Vandenabeele, P. and Maex, K., J. Vac. Sci. Technol. B9 (1991) 2784.
6. Tavares, J. and Bender, H., private communication.
7. ASTM, powder diffraction standards.
8. Dusausoy, Y., Protas, J., Wandji, R. and Roques, B., Acta Cryst., B27 (1971) 1209.
9. Tan, Z., Namavar, F., Budnick, J. I., Sanchez, F. H., Fasihuddin, A., Heald, S. M., Bouldin, C. E. and Woicik, J. C., Phys. Rev. B 46 (1992) 4077.
10. Dimitriadis, C. A., Werner, J. H., Logothetidis, S., Stutzmann, M., Weber, J. and Nesper, R., J. Appl. Phys. 68 (1990) 1726.
11. Regolini, J. L., Trincai, F., Berbezier, I. and Shapira, Y., Appl. Phys. Lett. 60 (1992) 956.

Formation of buried α- and β- FeSi2 in (100) Si by high dose ion implantation

  • K. Maex (a1), A. Lauwers (a1), M. Van Hove (a1), W. Vandervorst (a1) and M. Van Rossum (a1)...

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