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FLB/TEM Observation of Defect Structure Underneath an Indentation in Silicon

  • A. Shimatani (a1), T. Nango (a1), Suprijadi (a1) and H. Saka (a1)

Abstract

Defect structure beneath and near Vickers indentations made with loads of 10, 25 and 50g in Si has been studied in detail by TEM. Both plan-view and cross-sectional observations have been made. Beneath the 10 and 25g indentations an amorphous phase is formed, but beneath the 50g indentation no amorphous phase is formed.

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FLB/TEM Observation of Defect Structure Underneath an Indentation in Silicon

  • A. Shimatani (a1), T. Nango (a1), Suprijadi (a1) and H. Saka (a1)

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