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FLB/TEM Observation of Defect Structure Underneath an Indentation in Silicon
Published online by Cambridge University Press: 10 February 2011
Abstract
Defect structure beneath and near Vickers indentations made with loads of 10, 25 and 50g in Si has been studied in detail by TEM. Both plan-view and cross-sectional observations have been made. Beneath the 10 and 25g indentations an amorphous phase is formed, but beneath the 50g indentation no amorphous phase is formed.
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- Copyright © Materials Research Society 1998
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