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Fine Line Patterning By Focused Ion Beam Induced Decomposition of Palladium Acetate Films

  • L. R. Harriott (a1), K. D. Cummings (a1), M. E. Gross (a1), W. L. Brown (a1), J. Linnros (a1) and H. O. Funsten (a1)...

Abstract

Fine conducting features have been produced on Si and SiO2 substrates by irradiation of spin-on palladium acetate, [Pd(O2CCH3)2]3 films with a submicron focused ion beam. The exposures were made with a 20 keV Ga+, focused to a 0.2 micrometer spot. Electrical conductivity measuremnents were made on the resultant features as a function of ion dose for linewidths of one and ten micrometers. The sheet conductivity in the two cases was comparable and increased dramatically in the dose range between 2×1014 and 5×1014 ions/cm2. The conductivity of the exposed lines was further increased after heating in a hydrogen atmosphere. Measurements of carbon and oxygen content indicate that even at the highest ion doses a significant amount of organic material remains. Results are compared to those for 2 MeV He+ and Ne+ broad beam exposures. Potential applications are also discussed.

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[1] In a strict sense, organonetallic compounds are those in which a ligand carbon atomn is bonded directly to the metal. Therefore, we shall adopt the term metallo-organic to denote those compconds in which hydrocarbon nxieties in the ligand are coordinated to the metal through a heteroatom, a subset of the classical inorganic coordination complexes.
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[6] Harriott, L. R., Wagner, A., Fritz, F., J. Vac. Sci. Technoi., B4, 181 (1986).

Fine Line Patterning By Focused Ion Beam Induced Decomposition of Palladium Acetate Films

  • L. R. Harriott (a1), K. D. Cummings (a1), M. E. Gross (a1), W. L. Brown (a1), J. Linnros (a1) and H. O. Funsten (a1)...

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