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Films Grown on Vicinal GaAs(111) Substrates By Molecular Beam Epitaxy
Published online by Cambridge University Press: 25 February 2011
Abstract
The faceted surface morphology of films grown on on-axis GaAs(111) substrates in the reconstruction regime is studied with an atomic force microscope. It reveals that facets are vicinal surfaces. Surface morphologies of films grown on substrates tilted toward different directions have been compared. An explanation is given for all observed surface morphologies. Smooth films can only be obtained on substrates tilted toward [211] in the surface reconstruction regime.
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- Copyright © Materials Research Society 1992
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