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Film Thickness Effect on Tensile Properties and Microstructures of Submicron Aluminum Thin Films on Polyimide

Published online by Cambridge University Press:  15 February 2011

Y. S. Kang ,
P. S. Ho ,
R. Knipe  and
J. Tregilgas
Y. S. Kang
Affiliation:
Center for Materials Science and Engineering, University of Texas at Austin, Austin, TX 78712
P. S. Ho
Affiliation:
Center for Materials Science and Engineering, University of Texas at Austin, Austin, TX 78712
R. Knipe
Affiliation:
Texas Instruments Inc., Dallas, TX 75265
J. Tregilgas
Affiliation:
Texas Instruments Inc., Dallas, TX 75265
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Abstract

The mechanical behavior of the metal film on a polymer substrate becomes an important issue in microelectronics metallization. The metal/polymer structure is also useful to investigate the deformation behavior of very thin free-standing metal film since the flexible polymer serves as a deformable substrate. The tensile force-elongation curves have been measured using a microtensile tester for aluminum thin films, deposited on a PMDA-ODA polyimide film, in the thickness range from 60 rum to 480 nm. The stress-strain curves for aluminum films were constructed by subtracting these curves with polyimide curves measured separately. Tensile strength increases linearly with decreasing film thickness from 196 MPa to 408 MPa within the film thickness range studied. This is in good agreement with the published data for free-standing aluminum films in the same thickness range. The measured Young's modulus is lower than the bulk modulus and exhibits no systematic dependence on the film thickness. The microstructures of aluminum films have been examined using a transmission electron microscope (TEM). These films posses the (111)-textured columnar grain structures. Grain sizes exhibit log-normal distributions and the mean grain size increases monotonically with the film thickness. An attempt is made to evaluate the effect of film thickness and grain size on the strength of aluminum thin film and the result is discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 436: Symposium CC – Thin Films Stresses and Mechanical Properties VI , 1996 , 35
Copyright
Copyright © Materials Research Society 1997

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References

[1] Hornbeck, L.J., SPIE Critical Reviews 1150, 86 (1989)Google Scholar
[2] Mearini, G.T. and Hoffmnan, R.W., J. Electron. Mat. 22, 623 (1993)Google Scholar
[3] Hoffman, R.W., Mat. Res. Soc. Symp. Proc. 130, 295 (1989)Google Scholar
[4] Volkert, C.A., Alofs, C.F., and Liefting, J.R., J. Mat. Res. 9, 1147 (1994)Google Scholar
[5] Venkatraman, R. and Bravman, J.C., J. Mat. Res. 7, 2040 (1992)Google Scholar
[6] Venkatraman, R., Bravman, J.C., Nix, W.D., Davies, P.W., Flinn, P.A., and Fraser, D.B., J. Electron. Mat. 19, 1231 (1990)Google Scholar
[7] Kuan, T.S. and Murakami, M., Metall. Trans. A 13A, 383 (1982)Google Scholar
[8] Bartha, J.W., Hahn, P.O., LeGoues, F., and Ho, P.S., J. Vac. Sci. Technol. A 3, 1390 (1985)Google Scholar
[9] Chaudhari, P., Phil. Mag. 39, 507 (1979)Google Scholar
[10] Thompson, C.V., J. Mat. Res. 8, 237 (1993)Google Scholar