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Fibers and Grids by Integrated Circuit Technology

  • James E. Steinwall (a1) and H. H. Johnson (a1)

Abstract

Ceramic fibers and grids of controlled geometry and composition were fabricated by electron beam evaporation of Al2O3 onto substrates patterned by optical lithography. The fibers were 4 and 5μm wide by 1μm thick. In addition, mixed metal oxide films from 0 to 10at% Ti, Zr, or Cr were produced by coevaporation with Al2O3. The compositions of the films were determined by Rutherford Backscattering Spectroscopy. TEM and electron diffraction examination showed all the films to be amorphous in structure.

The Al2O3 fibers had tensile strengths between 143 and 168 ksi and the Al2O3 film had a microindentation hardness of 8.4 GPa. Films with ≈ 1at% additions of Zr, Ti, and Cr had hardnesses of 11.0, 9.7, and 8.8 GPa respectively. The hardness then decreased with higher Zr, Ti, and Cr concentrations

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[1] Stone, D., LaFontaine, W. R., Alexopoulous, P., Wu, T. W., and Li, C. Y., “An Investigation of Hardness and Adhesion of Sputter-Deposited Aluminum on Silicon by Utilizing a Continuous Indentation Test”, J. Mater. Res. 3 (1), 141147 (1988)
[2] Doolittle, L. R., “Algorithms for the Rapid Simulation of Rutherford Backscattering Spectra”, Nuclear Instruments and Methods B9 344 (1985)
[3] Doolittle, L. R.A Semiautomatic Algorithm for Rutherford Backscattering Analysis”, Nuclear Instruments and Methods B15 277 (1986)
[4] Levi, C. G., Abbaschian, G. J., and Mehrabian, R., “Interface Interactions During Fabrication of Aluminum Alloy—Alumina Fiber Composites”, Met. Trans. A, 9A (5), 697711 (1978)
[5] Oliver, W. C., McHargue, C. J., and Zinkle, S. J., “Thin Film Characterization Using a Mechanical Properties Microprobe”, Thin Solid Films, 1987. 185–196

Fibers and Grids by Integrated Circuit Technology

  • James E. Steinwall (a1) and H. H. Johnson (a1)

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