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Ferroelectric Properties of 15–20nm-Thick PZT Ultrathin Films Prepared by MOCVD

  • H. Nonomura (a1), H. Fujisawa (a1), M. Shimizu (a1), H. Niu (a1) and K. Honda (a2)...

Abstract

We investigated ferroelectric properties of 20nm-thick epitaxial Pb(Zr,Ti)O3 (PZT) ultrathin films prepared on SrRuO3 (SRO)/SrTiO3 (STO) by metalorganic chemical vapor deposition (MOCVD). When SRO with terrace ledges was used as a bottom electrode, 20nm-thick PZT ultrathin films with ferroelectricity were successfully obtained. These PZT films exhibited saturated hysteresis loops with remanent polarizations (Pr) of 29–33 μC/cm2 and coercive electric fields (Ec) of 340–370 kV/cm. On the other hand, when PZT films were grown on SRO without terrace ledges, PZT films showed no saturated hysteresis loops because of large leakage current. The 15nm-thick PZT ultrathin film exhibiting unsaturated hysteresis loop was also obtained.

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1. Larsen, P. K., Dormans, G. J., Taylor, D. J. and van Veldhoven, P. J., J. Appl. Phys. 76, 2405 (1994).
2. Maruyama, T., Saitoh, M., Sakai, I. and Hidaka, T., Appl. Phys. Lett. 73, 3524 (1998).
3. Yanase, N., Abe, K., Fukushima, N. and Kawakubo, T., Jpn. J. Appl. Phys. 38, 5305 (1999).
4. Lin, C. H., Friddle, P. A., Ma, C. H., Daga, A. and Chen, H., J. Appl. Phys. 90, 1509 (2001).
5. Kijima, T. and Ishiwara, H., Jpn. J. Appl. Phys. 41, L716 (2002).
6. Shimizu, M., Fujisawa, H. and Niu, H., Mater. Res. Soc. Symp. Proc. 596, 259 (2000).
7. Contreras, J. R., Schubert, J., Poppe, U., Trithaveesak, O., Szot, K., Buchal, Ch., Kohlstedt, H. and Waser, R., Mat. Res. Soc. Symp. Proc. 688, C8.10.1 (2002).
8. Nonomura, H., Fujisawa, H., Shimizu, M., Niu, H. and Honda, K., Abstr. 8th Workshop on Oxide Electronics, Osaka, 2001, p.50.
9. Shimizu, M., Fujisawa, H., Niu, H. and Honda, K., J. Cryst. Growth 237–239, 443 (2002).
10. Fujisawa, H., Nonomura, H., Shimizu, M. and Niu, H., J. Cryst. Growth 237–239, 455 (2002).
11. Nonomura, H., Fujisawa, H., Shimizu, M. and Niu, H., Jpn. J. Appl. Phys. 41, 6682 (2002).
12. Kawasaki, M., Takahashi, K., Maeda, T., Tsuchiya, R., Shinohara, M., Ishiyama, O., Yonezawa, T., Yoshimoto, M. and Koinuma, H., Science 266, 1540 (1994).
13. Koster, G., Kropman, B. L., Rijnders, G. J. H. M., Blank, D. H. A. and Rogalla, H., Appl. Phys. Lett. 73, 2920 (1998).

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Ferroelectric Properties of 15–20nm-Thick PZT Ultrathin Films Prepared by MOCVD

  • H. Nonomura (a1), H. Fujisawa (a1), M. Shimizu (a1), H. Niu (a1) and K. Honda (a2)...

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