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Fabrication of Thick, Sol Gel Pzt Films: Applications to Macroscopic Piezoelectric Devices

Published online by Cambridge University Press:  16 February 2011

D.A. Barrow ,
T.E. Petroff  and
M. Sayer
D.A. Barrow
Affiliation:
Department of Physics, Queen's University, Kingston, Ontario
T.E. Petroff
Affiliation:
Department of Chemistry, Queen's University, Kingston, Ontario
M. Sayer
Affiliation:
Department of Physics, Queen's University, Kingston, Ontario
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Abstract

Lead zirconate titanate (PZT) films of up to 60 μm in thickness have been fabricated on a wide variety of substrates using a new sol gel process. The dielectric properties (∈ = 900), ferroelectric (Ec = 16 kV/cm and Pr = 35 μC/cm 2) and piezoelectric properties are comparable to bulk values. The characteristic Curie point of these films is at 420 °C. Piezoelectric actuators have been developed by depositing thick PZT films on both planar and coaxial substrates. Stainless steel cantilevers and optical fibres coated with a PZT film exhibit flexure mode resonant vibrations observable with the naked eye. A low frequency in-line fibre optic modulator has been developed using a PZT coated optical fibre. The high frequency resonance of a 60 μm film on a aluminum substrate has been observed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 360 , 1994 , 103
Copyright
Copyright © Materials Research Society 1995

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References

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