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Fabrication of Photonic Crystal Biosensors using Micro-molding of Nanoporous Glass

  • Ian D. Block (a1), Leo L Chan (a2) and Brian T Cunningham (a3)

Abstract

We demonstrate a micro-molding method for submicron patterning of a low-index sol-gel nanoporous glass for the purpose of fabricating large-area (∼3”×”) label-free photonic crystal optical biosensors. SEM images show that the sol-gel exhibited minimal shrinkage and good substrate adhesion and depict precise and uniform pattern transfer over the fabricated area within the limits of measurement resolution. A unique characterization approach accurately and quickly revealed porous glass patterned over a large area with geometrical and material properties uniform within 1%. We suggest that this robust method is an excellent approach for photonic crystal sensor fabrication, and may also find applications in integrated optics and electronics.

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1 Geissler, M. and Xia, Y., Advanced Materials 16 (15), 1249 (2004).
2 Marzolin, C., Smith, S. P., Prentiss, M., Whitesides, G. M., Advanced Materials 10 (8), 571 (1998);
3 Block, I. D., Chan, L. L., and Cunningham, B. T., Sensors & Actuators B (Submitted July 2005).
4 Xia, Y. and Whitesides, G. M., Annual Review of Materials Science 28, 153 (1998).
5 Magnusson, R. and Wang, S. S., Applied Physics Letters 61, 1022 (1992).
6 Cunningham, B. T., Li, P., Lin, B., Pepper, J., Sensors and Actuators B 81, 316 (2002);
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8 Tormen, M., Borzenko, T., Steffen, B., Schmidt, G., Molenkamp, L.W., Microelectronic Engineering 61–62, 469 (2002).

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Fabrication of Photonic Crystal Biosensors using Micro-molding of Nanoporous Glass

  • Ian D. Block (a1), Leo L Chan (a2) and Brian T Cunningham (a3)

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