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Fabrication of nano-needle arrays on diamond surface by reactive ion etching

  • T. Misu (a1), K. Koh (a1) and T. Arai (a2)

Abstract

CVD polycrystalline diamond surfaces were etched using reactive ion etching system with either a conventional stainless steel electrode or MgO sintered ceramic containing electrode. The micro-needle array of high aspect on diamond substrate surfaces obtained with MgO electrode was fabricated by using back-sputtering from MgO electrode. The RMS roughness of diamond substrate surfaces obtained with MgO electrode is higher than those obtained with stainless steel electrode.

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Fabrication of nano-needle arrays on diamond surface by reactive ion etching

  • T. Misu (a1), K. Koh (a1) and T. Arai (a2)

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