Skip to main content Accessibility help

Fabrication And Characterization of Thermoelectric Generators From SiGe Thin Films

  • S. Budak (a1), S. Guner (a2), T. Hill (a3), M. Black (a3), S. B. Judah (a3), C. I Muntele (a4) and D. ILA (a5)...


Thermoelectric materials are being important due to their application in both thermoelectric power generation and microelectronic cooling. The thermoelectric power generations convert the heat change to electricity. The waste of heat could be useful if the thermoelectric power generation is applied. Effective thermoelectric materials have a low thermal conductivity and a high electrical conductivity. A high thermal conductivity causes too much heat leakage through heat conduction. The performance of the thermoelectric materials and devices is shown by a dimensionless figure of merit, ZT = S2σT/K, where S is the Seebeck coefficient, σ is the electrical conductivity, T is the absolute temperature and K is the thermal conductivity. ZT can be increased by increasing S, increasing σ, or decreasing K. In this study, we prepared thermoelectric generator devices of SiGe at the thickness of 112 nm using the ion beam assisted deposition (IBAD) system. Rutherford Backscattering Spectrometry (RBS) analysis was used for the elemental analysis. The 5 MeV Si ion bombardment was performed using the AAMU Pelletron ion beam accelerator to make quantum clusters in the film to decrease the cross plane thermal conductivity, increase the cross plane Seebeck coefficient and electrical conductivity. To characterize the thermoelectric generator devices before and after Si ion bombardment we measured the cross plane Seebeck coefficient, electrical conductivity by Van der Pauw method, and thermal conductivity by 3w method for different fluences.



Hide All
[1] Liu, J.L. Khitun, A. Wang, K.L. Borca-Tasciuc, T., Liu, W. L. Chen, G. Yu, D. P. Journal Crystal Growth, 227 (2001) 1111.
[2] Fan, Xiaofeng, Electronics Letters, 37 (2001) 126.
[3] Fan, Xiaofeng, Gehong Zeng, Appl. Phys. Lett., 78 (2001) 1580.
[4] Lee, S.M, Cahill, D.G. Appl. Phys. Lett., 70 (1997) 2957.10.1063/1.118755
[5] Dames, Chris and Chen, Gang, Rev. Sci. Instrum. 76 (2005) 124902.
[6] Cahill, D.G. Katiyar, M. Phys. Rev., B50 (1994) 6077 10.1103/PhysRevB.50.6077
[7] Ziegler, J.F. Biersack, J.P. Littmark, U. The Stopping Range of Ions in solids, Pergamon Press, New York, 1985.
[8] Dismukes, J.P. Ekstrom, L. Steigmeir, E.F. Kudman, I. Beers, D.S. J. Appl. Phys. 35 (1964) 2899.
[9] Campbell, I. H. Fauchet, P. M. Solid Stat Commun. 58, 739, 1986.
[10] Zheng, B. Budak, S. Muntele, C. Xiao, Z. Celaschi, C. Muntele, I. Chhay, B. Zimmerman, R. L., Holland, L. R. and ILA, D. Materials in Extreme Environments, Materials Research Society, 929 (2006) 81.


Fabrication And Characterization of Thermoelectric Generators From SiGe Thin Films

  • S. Budak (a1), S. Guner (a2), T. Hill (a3), M. Black (a3), S. B. Judah (a3), C. I Muntele (a4) and D. ILA (a5)...


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed