Hostname: page-component-8448b6f56d-42gr6 Total loading time: 0 Render date: 2024-04-19T11:09:05.407Z Has data issue: false hasContentIssue false
  • English
  • Français

Experimental Stress Analysis Methods and Some Thin Film Applications

Published online by Cambridge University Press:  22 February 2011

Joan K. Vrtis  and
Richard J. Farris
Joan K. Vrtis
Affiliation:
University of Massachusetts, Department of Polymer Science and Engineering, Amherst, MA 01003
Richard J. Farris
Affiliation:
University of Massachusetts, Department of Polymer Science and Engineering, Amherst, MA 01003
Get access

Abstract

Interference holographic methods are applied to thin film structures to determine their state of stress and their thermal and mass diffusion coefficients. Special sample preparation techniques are used to produce tensioned membrane samples that preserve the state of stress in coated parts. Then utilizing real time vibrational holographic interferometry methods, the total state of stress can be determined, two normal stresses and a shearstress. Similar samples exposed to moisture have their stress state altered by swelling and this can be monitored on a real-time basis and the influence on stress state and thethrough-the-thickness moisture diffusion coefficient can be determined. In related experiments using similar methods, the through-the-thickness thermal diffusion coefficient can be determined using pulse heating methods. These methods coupled with routine test methods enables one to fully characterize all of the orthotropic elasticity coefficients and transport characteristics needed for numerial analyses of thin film structures.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 338: Symposium – Materials Reliability in Microelectronics IV , 1994 , 527
Copyright
Copyright © Materials Research Society 1994

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Gabor, D., Nature, 161(4098), 777 (1948).Google Scholar
2. Aprahamian, R., Evensen, D.A., Mixson, J.S. and Jacoby, J.L., Experimental Mechanics, 1971, 357.Google Scholar
3. Kussmaul, K. and Ettemeyer, A., Nuclear Engineering and Design, 102, 307 (1987).Google Scholar
4. Fallstrom, K.E., Gustavsson, H., Molin, N.E., and Wahlin, A., Experimental Mechanics, 1989, 378.Google Scholar
5. Fällstrom, K.E., Gustavsson, H., Molin, N.E., and Wahlin, A., Experimental Mechanics, 198, 409.Google Scholar
6. Powell, R.L. and Stetson, K.A., J. Opt. Soc. Amer., 55, 1593 (1965)Google Scholar
7. Maden, M.A., PhD thesis, University of Massachusetts, Amherst, 1992.Google Scholar
8. Jung, P., SPIE, Optic in Engineering Measurement, 599, 32 (1985).Google Scholar
9. Goldberg, J.L., O'Toole, K.M. and Roper, H., Journal of Testing and Eval., 3(4), 263 (1975).Google Scholar
10. Harris, W.J. and Woods, D.C., Mater. Eval., 32, 50 (1974).Google Scholar
11. Gilbert, J.A. and Vedder, D.T., Experimental Mechanics, 1981, 138.Google Scholar
12. Aleck, B.J., J. Appl. Mechanics, 16(2), 118 (1949).Google Scholar
13. Noyan, I.C. and Nguyen, L.T., Polym. Eng. & Sci., 28(16), 1026 (1988).Google Scholar
14. Sato, K., Progress in Organic Coatings, 8(2), 143 (1980).Google Scholar
15. Perera, D.Y., Journal of Coatings Technology, 56(716), 111 (1984).Google Scholar
16. Perera, D.Y. and Ende, D.V., Journal of Coatings Technology, 59(748), 55 (1987).Google Scholar
17. Oosterbroek, M., Lammers, R.J., Ven, L.G.J. van der and Perera, D.Y., Journal of Coatings Technology, 63(797), 55 (1991).Google Scholar
18. Croll, S.G., J. of Appl. Polym. Sci., 23(3), 847 (1979).Google Scholar
19. Eisner, G., J. of Vac. Sci. Tech., A1(2), 407 (1983).Google Scholar
20. Arfken, G., Mathematical Methods for Physicists, 3rd. ed. (Academic Press, New York, 1985), p. 572.Google Scholar
21. Tong, K., PhD thesis, University of Massachusetts, Amherst, 1993.Google Scholar
22. Jou, C., PhD thesis, University of Massachusetts, Amherst, 1993.Google Scholar
23. Jou, C. and Farris, R.J., Acta. Polymerica, (submitted May, 1993).Google Scholar
24. Jou, C. and Farris, R.J., Experimental Mechanics, (accepted February, 1994).Google Scholar
25. Parker, W.J., Jenkins, R.J., Butler, C.P., and Abbott, G.L., J. of Appl. Phys., 32(9), 1679 (1960).Google Scholar
26. Vrtis, J.K. and Farris, R.J., Proc of the ACS, Div. of Polym. Matls: Sci & Eng., 69, 440, August (1993).Google Scholar
27. Vrtis, J.K. (unpublished results)Google Scholar