Skip to main content Accessibility help
×
Home

Experimental Measurements of Grain Boundary Rotation Toward Bamboo in Post-Pattern Annealing

  • D. L. Barr (a1), W. L. Brown (a1) and M. Ohring (a2)

Abstract

The microstructure of 0.8.µm, A1(0.5% Cu) lines has been measured both before and after post-pattern annealing in nitrogen at various times and temperatures. Grain boundary inclinations in single grain segments of lines were determined from Focused Ion Beam (FIB) images of two surfaces of the lines. The statistical distributions of inclination angles before and after annealing reveal the tendency for boundaries to rotate to reduce their area. In these experiments the rotation stagnates with the normals to the grain boundaries having a distribution of inclinations with a FWHM of about 33 degrees around the line direction.

Copyright

References

Hide All
1. Vaidya, I. S., Appl. Phys. Lett. 36(6), 464 (1980).
2. Frost, H.J., Hayashi, Y., Thompson, C.V., and Walton, D.T., Mat. Res. Symp. Proc., 338, 295 (1994).
3. Ziegler, J.F. and Biersack, J.P., Trim-91.
4. Marya, S.K. and Wyon, G, Metallography 9(2), 123 (1976).
5. Massalski, T.B., Binary Alloy Phase Diagrams (ASM International, 1986).

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed