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Experimental Evidence for the Dominance of vuv Photons in Remote Hydrogen Plasma Treatments

Published online by Cambridge University Press:  10 February 2011

R. Wilken ,
A. Hollander  and
J. Behnisch
R. Wilken
Affiliation:
Fraunhofer-Institut fir Angewandte Polymerforschung, Kantstr. 55, 14513 Teltow, Germany
A. Hollander
Affiliation:
Fraunhofer-Institut fir Angewandte Polymerforschung, Kantstr. 55, 14513 Teltow, Germany
J. Behnisch
Affiliation:
Fraunhofer-Institut fir Angewandte Polymerforschung, Kantstr. 55, 14513 Teltow, Germany
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Abstract

The flux of vacuum ultraviolet (VUV) and ultraviolet (UV) photons from a hydrogen plasma was detected by fluorescence measurements of sodium salicylate sheets with and without a MgF2 window. In order to expose the samples to the same photon flux in all experiments, the power input to the microwave plasma source was adjusted. Polyethylene (PE), polypropylene (PP), and polystyrene (PS) were treated with VUV radiation or with a remote hydrogen plasma. The mass loss and the CH-absorption loss were recorded by in situ quartz crystal micro balance and by in situ IR reflection absorption spectroscopy, respectively. The VUV irradiation and plasma treatment caused similar effects in the case of PE, PP showed an increased polymer ablation in plasma treatments, and for PS a negligible loss in mass and CH absorption was detected in plasma and VUV treatments.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 544: Symposium Y – Plasma Deposition and Treatment of Polymers , 1998 , 223
Copyright
Copyright © Materials Research Society 1999

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References

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