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Excimer-Laser Growth of Si Large-Grain Arrays

  • Masakiyo Matsumura (a1)

Abstract

Amorphous silicon (a-Si) Thin Film Transistors (TFT) will continue to play an important role in large-area liquid crystal displays (LCD), however, there is also a strong demand for ultra-high performance TFTs aimed at intelligent small (or medium) size displays. For this reason, “Crystal Si on glass” has become an increasingly attractive solution. This paper reviews recent work performed at ALTEDEC (Advanced LCD Technologies Development Center Co., Ltd, with regard to growing an array of large Si grains at low temperature. The results obtained so far indicate that satisfactory progress has been made towards the achievement of this goal.

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Excimer-Laser Growth of Si Large-Grain Arrays

  • Masakiyo Matsumura (a1)

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