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Excimer Pulsed Laser Ablated Molecular Beam Evaporation for the Deposition of Binary Skutterudites

Published online by Cambridge University Press:  10 February 2011

H.-A. Durand ,
A. Suzuki ,
K. Nishimoto ,
K. Ito  and
I. Kataoka
H.-A. Durand
Affiliation:
Japan Aviation Electronics Industry Ltd, Central Research Laboratory, Musashino 3-1-1, Akishima-shi, Tokyo 196-8555, Japan, hadurand@jae.co.jp
A. Suzuki
Affiliation:
Japan Aviation Electronics Industry Ltd, Central Research Laboratory, Musashino 3-1-1, Akishima-shi, Tokyo 196-8555, Japan
K. Nishimoto
Affiliation:
Japan Aviation Electronics Industry Ltd, Central Research Laboratory, Musashino 3-1-1, Akishima-shi, Tokyo 196-8555, Japan
K. Ito
Affiliation:
Japan Aviation Electronics Industry Ltd, Central Research Laboratory, Musashino 3-1-1, Akishima-shi, Tokyo 196-8555, Japan
I. Kataoka
Affiliation:
Japan Aviation Electronics Industry Ltd, Central Research Laboratory, Musashino 3-1-1, Akishima-shi, Tokyo 196-8555, Japan
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Abstract

The family of materials bearing the skutterudite crystallographic structure have recently attracted interest because of their extra-ordinary electrical and thermal transport properties, as well as their peculiar magnetic qualities [1]. Particularly, the group of cobalt antimonide skutterudites has been referred to as electron crystals and phonon glasses. With the goal to prepare skutterudite thin films, laser ablation is unique in its capacity to transfer skutterudite target's complex composition untouched to substrates while providing an hype thermal beam that has a positive influence on thin film growth. We use a pulsed excimer laser at 193 nm to evaporate skutterudites targets in ultra-high vacuum and deposit thins films on silicon wafers and fused silica substrate. We have studied the composition and crystallographic structure of the deposits as a function of substrate temperature and target to substrate distance. Deposits are skutterudite policrystals of several hundreds nanometers. We investigated the electrical as well as the thermal transport properties of thin films having the desired phase and compare these with value reported for the bulk mono-crystals.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 616: Symposium I – New Methods, Mechanisms & Models of Vapor Deposition , 2000 , 177
Copyright
Copyright © Materials Research Society 2000

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