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Excimer Laser Ablation of Sodium Trisilicate Glass

Published online by Cambridge University Press:  25 February 2011

P. A. Eschbach ,
J. T. Dickinson  and
L. R. Pederson
P. A. Eschbach
Affiliation:
Department of Physics, Washington State University, Pullman, WA 99164
J. T. Dickinson
Affiliation:
Department of Physics, Washington State University, Pullman, WA 99164
L. R. Pederson
Affiliation:
Battelle Pacific Northwest Laboratories, Richland, WA 99352
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Abstract

We examine effects resulting from the irradiation of glassy sodium trisilicate (Na2O 3SiO2) with 248 nm excimer laser light at fluences from 1–5 J/cm2. We observe a threshold for the onset of etching of the surface at 3 J/cm2. We present SEM images of the resulting surface topography under etching conditions as well as recent measurements of the particle emission and photon emission from atoms leaving the surface region. A clear correlation is observed between this etching threshold and a) onset of emission of fast excited neutrals, as well as b) the appearance of atomic Na D resonance radiation emitted from particles up to several cm from the surface. We also present identifiction of the emitted positive ions.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 129: Symposium B – Laser and Particle-Beam Modification of Chemical Processes on Surfaces , 1988 , 385
Copyright
Copyright © Materials Research Society 1989

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References

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