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Evolution of the Surface Structure of CVD Tungsten During Annealing
Published online by Cambridge University Press: 15 February 2011
Abstract
This paper reports a study in which a rough tungsten surface was prepared by chemical vapor deposition of tungsten on a tungsten ribbon. The samples were then heated to study the smoothing behavior of the rough surface. The results show that at 1600°C the surface becomes smooth after approximately five to ten hours. At 2400°C the surface becomes smooth within 15 minutes.
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- Copyright © Materials Research Society 1996