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Evolution of Crystallinity in Mixed-Phase (a+μc)-Si:H as Determined by Real Time Spectroscopic Ellipsometry

Published online by Cambridge University Press:  01 February 2011

A. S. Ferlauto ,
G. M. Ferreira ,
R.J. Koval ,
J.M. Pearce ,
C.R. Wronski ,
R.W. Collins ,
M. M. Al-Jassim  and
K. M. Jones
A. S. Ferlauto
Affiliation:
National Renewable Energy Laboratory, 1617 Cole Boulevard, Golden, CO 80401
G. M. Ferreira
Affiliation:
National Renewable Energy Laboratory, 1617 Cole Boulevard, Golden, CO 80401
R.J. Koval
Affiliation:
National Renewable Energy Laboratory, 1617 Cole Boulevard, Golden, CO 80401
J.M. Pearce
Affiliation:
National Renewable Energy Laboratory, 1617 Cole Boulevard, Golden, CO 80401
C.R. Wronski
Affiliation:
National Renewable Energy Laboratory, 1617 Cole Boulevard, Golden, CO 80401
R.W. Collins
Affiliation:
National Renewable Energy Laboratory, 1617 Cole Boulevard, Golden, CO 80401
M. M. Al-Jassim
Affiliation:
Department of Physics, Materials Research Institute, and Center for Thin Film Devices, The Pennsylvania State University, University Park, PA 16802
K. M. Jones
Affiliation:
Department of Physics, Materials Research Institute, and Center for Thin Film Devices, The Pennsylvania State University, University Park, PA 16802
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Abstract

The ability to characterize the phase of the intrinsic (i) layers incorporated into amorphous silicon [a-Si:H] and microcrystalline silicon [μc-Si:H] thin film solar cells is critically important for cell optimization. In our research, a new method has been developed to extract the thickness evolution of the μc-Si:H volume fraction in mixed phase amorphous + microcrystalline silicon [(a+μc)-Si:H] i-layers. This method is based on real time spectroscopic ellipsometry measurements performed during plasma-enhanced chemical vapor deposition of the films. In the analysis, the thickness at which crystallites first nucleate from the a-Si:H phase can be estimated, as well as the nucleation density and microcrystallite cone angle. The results correlate well with structural and solar cell measurements.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 762: Symposium A – Amorphous and Nanocrystalline Silicon-Based Films – 2003 , 2003 , A5.10
Copyright
Copyright © Materials Research Society 2003

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