Skip to main content Accessibility help
×
Home

Evidence for a Grain Boundary Grooving Model of Agglomeration in Polycrystalline Tisi2 Thin Films

  • Thomas Nolan (a1), Robert Beyers (a2) and Robert Sinclair (a1)

Abstract

An equilibrium model for agglomeration based upon the mechanism of grain boundary grooving in polycrystalline thin films is suggested. It involves an energy balance between surface, interface, and grain boundary energies, and predicts parameters which will influence the onset of agglomeration. It has been determined that small grain size, low grain boundary energy, high film surface and interface energies, and growth of single crystal epitaxial layers should promote resistance to agglomeration. Polycrystalline TiSi2 thin films deposited on Si substrates have been observed using cross-section TEM. The micrographs provide evidence that, for these films, the grain boundary grooving mechanism is dominant and most of the modeling assumptions are valid.

Copyright

References

Hide All
1. Hung, L. S., Gulai, J., Mayer, J. W., Lau, S. S., and Nicolet, M-A., J. Appl. Phys. 54 (1983).
2. Wong, C. Y., Wang, L. K., McFarland, P. A., and Ting, C. Y., J. Appl. Phys. 60 1 (1986).
3. Yoshida, T., Ogawa, S., Okuda, S., Kouzaki, T., and Tsukamoto, K., Mat. Res. Soc. Symp. Proc 102, (1988).
4. Srolovitz, D. J. and Safran, S. A., J. Appl. Phys. 60, 247 (1986).
5. Chalmers, B., King, R., and Shuttleworth, R., Proc. Roy. Soc. A, 193, 465 (1948).
6. Mullins, W.W., J. Appl. Phys. 28, 333 (1957).
7. Herring, C., Structure and Properties of Solid Surfaces. Eds. Gomer, R. and Smith, C. S. (University of Chicago Press, Chicago, 1952) Ch.1.
8. Nolan, T., Beyers, R., and Sinclair, R., submitted for publication.
9. Rosser, P. J. and Tomkins, G. J., Mat. Res. Soc. Symp. Proc. 35, (1985).
10. Steffen, A., Korec, J. and Balk, P., Thin Solid Films, 138, 235 (1986).
11. Delfino, M., Broadbent, E. K., Morgan, A. E., Burrow, B. J., and Norcott, M. H., IEEE Electron Device Letters, Vol. EDL–6, No. 11 (1985).
12. Ogawa, S. and Yoshida, T., Appl. Phys. Lett, 56 725 (1989).
13. Morgan, A. E., Broadbent, E. K., and Sadana, D. K., Appl. Phys. Lett. 49, 1236 (1986).
14. Lin, T. L., Fathauer, R. W., Grunthaner, P. J., and d'Anterroches, C., Appl. Phys. Lett. 52, 804 (1988).
15 Tung, R. T., J. Vac. Sci. Technol. A7 (3), 598 (1989).
16. Murr, L. E., Interfacial Phenomena in Metals and Allovs, Addison-Wesley, London, (1975).
17. Jones, H., Metal Science Journal, 5, 15 (1971).

Evidence for a Grain Boundary Grooving Model of Agglomeration in Polycrystalline Tisi2 Thin Films

  • Thomas Nolan (a1), Robert Beyers (a2) and Robert Sinclair (a1)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed