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Evaluation of Magnesium Oxide Films by Spectroscopic Ellipsometry

Published online by Cambridge University Press:  14 March 2011

Hiroshi Kimura
Hiroshi Kimura*
Affiliation:
Device Analysis Technology Laboratories, NEC Corporation, 1753 Shimonumabe, Nakahara-ku, Kawasaki, Kanagawa, 211-8666, JAPAN
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Abstract

Spectroscopic ellipsometry was used to evaluate the density and surface roughness of MgO films. The density of a film affects the dispersion of the film's refractive index, and the refractive index can be evaluated by spectroscopic ellipsometry. Among the various fitting models applied to all of the deposited films, the two-layered model gave the best results. For the two-layered model, we found that the thickness of the upper layer was strongly correlated with surface roughness. Thus, spectroscopic ellipsometry can be used to evaluate density and roughness.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 621: Symposia Q/R – Electron-Emissive Materials, Vacuum Microelectronics… , 2000 , Q5.7.1
Copyright
Copyright © Materials Research Society 2000

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References

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