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Evaluation of Large Diameter InP Substrate Material

  • K. D. C. Trapp (a1), M. T. Asom (a1), G. E. Carver (a2), E. M. Monberg (a3), F. A. Thiel (a3) and R. L. Barns (a3)...

Abstract

Expanding interest in large-scale fabrication of electronic and photonic devices and in the scale-up of epitoxial growth reactors is creating the need for high quality large diameter InP substrate material. This paper will discuss the evaluating of three-inch diameter semi-insulating Fe-doped InP substrate material purchased from two commercial suppliers. The results of Photon Back Scatter, Infrared Transmission Microscopy, Hall Effect, and Spatially Resolved Photoluminescence measurements will be presented and evaluated.

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Evaluation of Large Diameter InP Substrate Material

  • K. D. C. Trapp (a1), M. T. Asom (a1), G. E. Carver (a2), E. M. Monberg (a3), F. A. Thiel (a3) and R. L. Barns (a3)...

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